Mahammad Sanjid Arif, Chaudhary K P, Yadav Sanjay, Sen Mrinal, Ghoshal Sanjoy K
Length, Dimension, and Nanometrology, CSIR- National Physical Laboratory, New Delhi 110012, India.
Department of Electronics and Communication Engineering, Maharaja Surajmal Institute of Technology, New Delhi 110058, India.
Rev Sci Instrum. 2020 Jun 1;91(6):065112. doi: 10.1063/1.5135359.
The inaccurate deflection behavior of the probing system degrades the performance of the diameter-measuring machines. In this experiment, the probing is improved, applying an autocollimator and an angular positioning datum. We have devised this datum using a liquid wedge. A ring gauge is chosen as a workpiece to evaluate the deflection behavior of the probing system. The improved uncertainty of the probing is found as low as 40 nm. Subsequently, the inner diameter of the ring gauge is measured on this experimental setup. By employing a simulation, we aligned the workpiece. The deflections of the stylus are optimized to achieve zero deflection error at the zenith points. Consequently, the swing of the probe at the zenith points is combined with the rectilinear displacement of the workpiece to estimate the inner diameter. The uncertainty of the measurement of the ring gauge is improved up to 140 nm.
探测系统不准确的偏转行为会降低直径测量仪的性能。在本实验中，通过应用自准直仪和角定位基准对探测进行了改进。我们利用液体楔设计了这个基准。选择环规作为工件来评估探测系统的偏转行为。发现改进后的探测不确定度低至40纳米。随后，在该实验装置上测量环规的内径。通过模拟，我们对工件进行了对齐。优化了触针的偏转，以在天顶处实现零偏转误差。因此，将探针在天顶处的摆动与工件的直线位移相结合来估计内径。环规测量的不确定度提高到了140纳米。
