Ruder Alexander, Wright Brandon, Peev Darin, Feder Rene, Kilic Ufuk, Hilfiker Matthew, Schubert Eva, Herzinger Craig M, Schubert Mathias
Opt Lett. 2020 Jul 1;45(13):3541-3544. doi: 10.1364/OL.398060.
We demonstrate calibration and operation of a single wavelength (660 nm) Mueller matrix ellipsometer in normal transmission configuration using dual continuously rotating anisotropic mirrors. The mirrors contain highly spatially coherent nanostructure slanted columnar titanium thin films deposited onto optically thick gold layers on glass substrates. Upon rotation around the mirror normal axis, sufficient modulation of the Stokes parameters of light reflected at oblique angle of incidence is achieved. Thereby, the mirrors can be used as a polarization state generator and polarization state analyzer in a generalized ellipsometry instrument. A Fourier expansion approach is found sufficient to render and calibrate the effects of the mirror rotations onto the polarized light train within the ellipsometer. The Mueller matrix elements of a set of anisotropic samples consisting of a linear polarizer and a linear retarder are measured and compared with model data, and very good agreement is observed.
我们展示了一种单波长（660纳米）穆勒矩阵椭圆偏振仪在正常透射配置下的校准和操作，该仪器使用了双连续旋转的各向异性反射镜。这些反射镜包含高度空间相干的纳米结构倾斜柱状钛薄膜，沉积在玻璃基板上光学厚度的金层上。绕反射镜法线轴旋转时，可实现对以斜入射角反射的光的斯托克斯参数的充分调制。因此，这些反射镜可在广义椭圆偏振仪中用作偏振态发生器和偏振态分析仪。发现一种傅里叶展开方法足以呈现和校准反射镜旋转对椭圆偏振仪内偏振光传输的影响。测量了一组由线性偏振器和线性延迟器组成的各向异性样品的穆勒矩阵元素，并与模型数据进行比较，观察到非常好的一致性。
