Kolenatý David, Vlček Jaroslav, Bárta Tomáš, Rezek Jiří, Houška Jiří, Haviar Stanislav
Department of Physics and NTIS - European Centre of Excellence, University of West Bohemia, Univerzitní 8, 306 14, Plzeň, Czech Republic.
Sci Rep. 2020 Jul 6;10(1):11107. doi: 10.1038/s41598-020-68002-5.
We report on high-performance thermochromic ZrO/VWO/ZrO coatings with a low transition temperature prepared on glass by a low-temperature scalable deposition technique. The VWO layers were deposited by a controlled high-power impulse magnetron sputtering of V target, combined with a simultaneous pulsed DC magnetron sputtering of W target to reduce the transition temperature to 20-21 °C, at a low substrate surface temperature of 330 °C in an argon-oxygen gas mixture. ZrO antireflection layers both below and above the thermochromic VWO layers were deposited at a low substrate temperature (< 100 °C). A coating design utilizing a second-order interference in the ZrO layers was applied to increase both the luminous transmittance (T) and the modulation of the solar transmittance (ΔT). The ZrO/VWO/ZrO coatings exhibit T up to 60% at ΔT close to 6% for a VWO thickness of 45 nm, and T up to 50% at ΔT above 10% for a VWO thickness of 69 nm.
我们报道了通过低温可扩展沉积技术在玻璃上制备的具有低转变温度的高性能热致变色ZrO/VWO/ZrO涂层。VWO层通过对V靶进行可控的高功率脉冲磁控溅射沉积，并结合对W靶同时进行脉冲直流磁控溅射，在氩氧混合气体中330℃的低衬底表面温度下将转变温度降低至20 - 21℃。在热致变色VWO层下方和上方的ZrO抗反射层均在低衬底温度（<100℃）下沉积。应用了一种利用ZrO层中二阶干涉的涂层设计，以提高发光透射率（T）和太阳透射率调制（ΔT）。对于45nm的VWO厚度，ZrO/VWO/ZrO涂层在ΔT接近6%时T高达60%，对于69nm的VWO厚度，在ΔT高于10%时T高达50%。
