Sun Ru-Jing, Huang Hung Ji, Hsiao Chien-Nan, Lin Yu-Wei, Liao Bo-Huei, Chou Chau Yuan-Fong, Chiang Hai-Pang
Department of Optoelectronics and Materials Technology, National Taiwan Ocean University, Keelung 202, Taiwan.
Taiwan Instrument Research Institute, National Applied Research Laboratories, Hsinchu 300, Taiwan.
Nanomaterials (Basel). 2020 Jul 6;10(7):1325. doi: 10.3390/nano10071325.
A TiN-based substrate with high reusability presented high-sensitivity refractive index measurements in a home-built surface plasmon resonance (SPR) heterodyne phase interrogation system. TiN layers with and without additional inclined-deposited TiN (i-TiN) layers on glass substrates reached high bulk charge carrier densities of 1.28 × 10 and 1.91 × 10 cm, respectively. The additional 1.4 nm i-TiN layer of the nanorod array presented a detection limit of 6.1 × 10 RIU and was higher than that of the 46 nm TiN layer at 1.2 × 10 RIU when measuring the refractive index of a glucose solution. Furthermore, the long-term durability of the TiN-based substrate demonstrated by multiple processing experiments presented a high potential for various practical sensing applications.
一种具有高可重复使用性的氮化钛基衬底,在自制的表面等离子体共振(SPR)外差相位询问系统中呈现出高灵敏度的折射率测量结果。在玻璃衬底上有无额外倾斜沉积氮化钛(i-TiN)层的氮化钛层,分别达到了1.28×10和1.91×10 cm的高体电荷载流子密度。纳米棒阵列额外的1.4 nm i-TiN层在测量葡萄糖溶液折射率时的检测限为6.1×10 RIU,高于46 nm氮化钛层在1.2×10 RIU时的检测限。此外,多次处理实验证明的氮化钛基衬底的长期耐久性,为各种实际传感应用展现出了巨大潜力。