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皱纹图案与微球阵列光刻图案的耦合。

Coupling of wrinkle patterns to microsphere-array lithographic patterns.

作者信息

Ohzono Takuya, Matsushita Sachiko I, Shimomura Masatsugu

机构信息

Dissipative-Hierarchy Structures Laboratory, Spatio-Temporal Function Materials Research Group, Frontier Research System, RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.

Dissipative-Hierarchy Structures Laboratory, Spatio-Temporal Function Materials Research Group, Frontier Research System, RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan and Nanotechnology Research Center, Research Institute for Electronic Science, Hokkaido University, N21W10, Sapporo, 001-0021, Japan.

出版信息

Soft Matter. 2005 Aug 5;1(3):227-230. doi: 10.1039/b503127c.

DOI:10.1039/b503127c
PMID:32646078
Abstract

We report a method to modulate spontaneously formed microwrinkle patterns on a metal-capped elastomer surface by introducing lithographic patterns (structures) on the original surface as spatial triggers for directed wrinkling. The lithographic patterns are designed to have approximately the same lateral length scales as the characteristic wavelength of the microwrinkles by utilizing self-assembled two-dimensional microsphere arrays with hexagonal packing as a lithographic mask. When the lateral periodicity of the lithographic pattern is close to the wavelength of wrinkles, a novel directional order originating from the hexagonal packing of microspheres is induced. Otherwise, the wrinkle crests tend to form along the small ridges of the lithographic structure. The compression direction-dependent and reversible ordering of wrinkle patterns by compressive strain is also found for patterns with directional order.

摘要

我们报告了一种通过在原始表面引入光刻图案(结构)作为定向皱纹的空间触发因素,来调制金属包覆弹性体表面自发形成的微皱纹图案的方法。利用具有六边形排列的自组装二维微球阵列作为光刻掩模,将光刻图案设计成具有与微皱纹特征波长近似相同的横向长度尺度。当光刻图案的横向周期性接近皱纹波长时,会诱导出一种源于微球六边形排列的新型定向有序。否则,皱纹波峰倾向于沿着光刻结构的小脊形成。对于具有定向有序的图案,还发现了通过压缩应变实现的皱纹图案的压缩方向依赖性和可逆有序性。

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