Wu Qi, Qiao Yancong, Guo Rui, Naveed Shayan, Hirtz Thomas, Li Xiaoshi, Fu Yixin, Wei Yuhong, Deng Ge, Yang Yi, Wu Xiaoming, Ren Tian-Ling
Institute of Microelectronics, Tsinghua University, Beijing 100084, China.
Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.
ACS Nano. 2020 Aug 25;14(8):10104-10114. doi: 10.1021/acsnano.0c03294. Epub 2020 Jul 22.
The flexible pressure sensor is one of the essential components of the wearable device, which is a critical solution to the applications of artificial intelligence and human-computer interactions in the future. Due to its simple manufacturing process and measurement methods, research related to piezoresistive mechanical sensors is booming, and those sensors are already widely used in industry. However, existing pressure sensors are almost all based on negative resistance variations, making it difficult to reach a balance between the sensitivity and the detection range. Here, we demonstrated a low-cost flexible pressure sensor with a positive resistance-pressure response based on laser scribing graphene. The sensor can be customized and modulated to achieve both an ultrahigh sensitivity and a broad detection range. Furthermore, the device possesses the signal amplification property like a mechanical triode under the external pressure bias. Based on its amplification ability, varieties of physiological signals and human movements have been detected using our devices; then, an integrated gait monitoring system has been realized. The reported positive graphene pressure sensor has outstanding capability, showing a wide application range such as intelligent perception, an interactive device, and real-time health/motion monitoring.
柔性压力传感器是可穿戴设备的关键组件之一，是未来人工智能和人机交互应用的关键解决方案。由于其制造工艺和测量方法简单，与压阻式机械传感器相关的研究蓬勃发展，这些传感器已在工业中广泛应用。然而，现有的压力传感器几乎都基于负电阻变化，难以在灵敏度和检测范围之间取得平衡。在此，我们展示了一种基于激光刻写石墨烯的具有正电阻 - 压力响应的低成本柔性压力传感器。该传感器可定制和调制，以实现超高灵敏度和宽检测范围。此外，该器件在外部压力偏置下具有类似机械三极管的信号放大特性。基于其放大能力，我们的设备已检测到各种生理信号和人体运动；然后，实现了一个集成的步态监测系统。所报道的正石墨烯压力传感器具有出色的性能，在智能感知、交互设备和实时健康/运动监测等方面显示出广泛的应用范围。
