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使用旋转超声螺旋电极改善线电化学微加工中的加工定位和表面粗糙度

Improving Machining Localization and Surface Roughness in Wire Electrochemical Micromachining Using a Rotating Ultrasonic Helix Electrode.

作者信息

Ling Siying, Li Minghao, Liu Yong, Wang Kan, Jiang Yong

机构信息

Key Laboratory for Precision & Non-traditional Machining of Ministry of Education, Dalian University of Technology, Dalian 116024, China.

Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China.

出版信息

Micromachines (Basel). 2020 Jul 19;11(7):698. doi: 10.3390/mi11070698.

Abstract

Wire electrochemical micromachining (WECMM) technology is regarded a promising method to fabricate high aspect ratio microstructures on hard-to-machining materials, however, the by-product accumulation in the machining gap limits its application. In this paper, a new method called ultrasonic-assisted wire electrochemical micromachining (UA-WECMM) is proposed to improve the machining performance of WECMM. Firstly, a flow-field simulation in the machining gap was carried out; the results showed that the ultrasonic vibration of electrode can remarkably enhance the mass transport in the machining gap and improve the machining condition. Secondly, experiments were performed to confirm the effect of ultrasonic vibration, which illustrated that the vibration with proper amplitude can reduce the slit width and improve the morphology of machined surface. Moreover, the influence of other machining parameters were also discussed. Finally, a T-type micro connector with good surface roughness (a 0.286 μm) was fabricated on a 300-μm-thick 304 stainless steel workpiece and a micro gear (diameter: 3.362 mm; a: 0.271 μm) with an aspect ratio of 7 was fabricated on a 2-mm-thick workpiece. It is proved that the proposed ultrasonic-assisted wire electrochemical micromachining method has considerable potential and broad application prospects.

摘要

线电极电化学微加工(WECMM)技术被认为是一种在难加工材料上制造高深宽比微结构的有前途的方法,然而,加工间隙中的副产物堆积限制了其应用。本文提出了一种名为超声辅助线电极电化学微加工(UA-WECMM)的新方法来提高WECMM的加工性能。首先,对加工间隙进行了流场模拟;结果表明,电极的超声振动能显著增强加工间隙中的传质并改善加工条件。其次,进行了实验以证实超声振动的效果,结果表明适当振幅的振动可以减小缝隙宽度并改善加工表面的形貌。此外,还讨论了其他加工参数的影响。最后,在厚度为300μm的304不锈钢工件上制造了表面粗糙度良好(为0.286μm)的T型微连接器,并在厚度为2mm的工件上制造了长径比为7的微齿轮(直径:3.362mm;表面粗糙度:0.271μm)。结果证明,所提出的超声辅助线电极电化学微加工方法具有相当大的潜力和广阔的应用前景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4ff8/7408162/a561545a7b84/micromachines-11-00698-g001.jpg

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