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用于电化学微加工的纳秒尖峰脉冲电源的研制。

Development of nanosecond spike pulse power supply for electrochemical micromachining.

作者信息

Zhao Chuanjun, Zou Qingzhi, Ren Xiaoguang, Xu Lizhong

机构信息

School of Mechanical Engineering, Yanshan University, Qinhuangdao, 066004, China.

College of Mechanical and Electrical Engineering, Hebei Normal University of Science & Technology, Qinhuangdao, 066004, China.

出版信息

Sci Rep. 2023 Dec 21;13(1):22833. doi: 10.1038/s41598-023-48793-z.

Abstract

The use of pulse voltage can greatly improve the precision of electrochemical microfabrication, and the narrower the pulse width of the applied pulse voltage signal, the higher the machining precision. However, the commonly used chopper circuit topology of pulse power supplies is limited by the maximum switching frequency of the field-effect transistor. To address this problem, this paper proposes a nanosecond pulse electrochemical micromachining power supply based on a differential circuit. The power supply uses the STM32F103C8T6 microcontroller as the control core to output high-performance rectangular waves through a DDS device. After differential, rectification, filtering, and power amplification processing, stable, frequency, amplitude, and pulse width adjustable spike pulse voltage signals are obtained. By establishing a system mathematical model and optimizing the time constant of the differential circuit, theoretically, the sub-nanosecond pulse width can be obtained. Prototype performance tests show that the power supply has a maximum frequency of 20 MHz, a minimum pulse width of 1.8 ns, and a maximum peak voltage of 10 V. By using this power supply for microhole electrochemical machining experiments, nanometer-level machining precision has been achieved.

摘要

脉冲电压的使用能够极大地提高电化学微加工的精度,并且施加的脉冲电压信号的脉宽越窄,加工精度越高。然而,脉冲电源常用的斩波电路拓扑受到场效应晶体管最大开关频率的限制。为解决这一问题,本文提出了一种基于差分电路的纳秒脉冲电化学微加工电源。该电源以STM32F103C8T6微控制器作为控制核心,通过直接数字频率合成(DDS)器件输出高性能矩形波。经过差分、整流、滤波及功率放大处理后,可获得稳定的、频率、幅度及脉宽可调的尖峰脉冲电压信号。通过建立系统数学模型并优化差分电路的时间常数,理论上可获得亚纳秒级脉宽。样机性能测试表明,该电源的最大频率为20MHz,最小脉宽为1.8ns,最大峰值电压为10V。通过使用该电源进行微孔电化学加工实验,已实现了纳米级的加工精度。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8fdf/10739692/7611c7f9033e/41598_2023_48793_Fig1_HTML.jpg

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