Hao Rui, Yu Huijun, Peng Bei, Zhan Haixiang, Zhou Wu
School of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.
Sensors (Basel). 2020 Jul 16;20(14):3959. doi: 10.3390/s20143959.
A micro vibratory platform driven by converse piezoelectric effects is a promising in-situ recalibration platform to eliminate the influence of bias and scale factor drift caused by long-term storage of micro-electro-mechanical system (MEMS) inertial sensors. The calibration accuracy is critically determined by the stable and repeatable vibration of platform, and it is unavoidably impacted by the residual stress of micro structures and lead zirconate titanate (PZT) hysteresis. The abnormal phenomenon of the observed displacement response in experiments was investigated analytically using the stiffness model of beams and hysteresis model of piezoelectric material. Rather than the hysteresis, the initial deflection formed by the residual stress of the beam was identified as the main cause of the response error around the zero position. This conclusion provides guidelines to improve the performance and control of micro vibratory platforms.
由逆压电效应驱动的微振动平台是一种很有前景的原位校准平台，可消除微机电系统（MEMS）惯性传感器长期存储所引起的偏置和比例因子漂移的影响。校准精度关键取决于平台稳定且可重复的振动，并且不可避免地会受到微结构残余应力和锆钛酸铅（PZT）滞后现象的影响。利用梁的刚度模型和压电材料的滞后模型，对实验中观察到的位移响应异常现象进行了分析研究。结果发现，梁的残余应力形成的初始挠度而非滞后现象，才是零位置附近响应误差的主要原因。这一结论为提高微振动平台的性能和控制提供了指导方针。
