Royon Maxime, Vocanson Francis, Jamon Damien, Marin Emmanuel, Morana Adriana, Boukenter Aziz, Girard Sylvain, Ouerdane Youcef, Royer François, Jourlin Yves
Univ Lyon, Laboratoire H. Curien, UJM-CNRS-IOGS, 18 rue du Pr. 42000 Benoît Lauras, Saint-Etienne, France.
Materials (Basel). 2020 Aug 24;13(17):3730. doi: 10.3390/ma13173730.
The photo-induced effects on sol-gel-based organo TiO-SiO thin layers deposited by the dip-coating technique have been investigated using two very different light sources: A light-emitting diode (LED) emitting in the UV (at 365 nm, 3.4 eV) and an X-ray tube producing 40 keV mean-energy photons. The impact of adding a photo-initiator (2,2-dimethoxy-2-phenylacetophenone-DMPA) on the sol-gel photosensitivity is characterized namely in terms of the photo-induced refractive index measured through M-line spectroscopy. Results show that both silica-titania sol-gel films with or without the photo-initiator are photosensitive to both photon sources. The induced refractive index values reveal several features where slightly higher refractive indexes are obtained for the sol-gel containing the photo-initiator. UV and X-ray-induced polymerization degrees are discussed using Fourier-transform infrared (FTIR) spectroscopy where the densification of hybrid TiO-SiO layers is related to the consumption of the CH=C groups and to the decomposition of Si-OH and Si-O-CH bonds. X-rays are more efficient at densifying the TiO-SiO inorganic and organic network with respect to the UV photons. Hard X-ray photolithography, where no cracks or damages are observed after intense exposition, can be a promising technique to design submicronic-structure patterns on TiO-SiO thin layers for the building of optical sensors.
利用两种截然不同的光源,研究了浸涂技术制备的基于溶胶-凝胶的有机TiO-SiO薄膜的光致效应:一种是发射紫外线(波长365nm,能量3.4eV)的发光二极管(LED),另一种是产生平均能量为40keV光子的X射线管。添加光引发剂(2,2-二甲氧基-2-苯基苯乙酮-DMPA)对溶胶-凝胶光敏性的影响,具体通过M线光谱法测量的光致折射率来表征。结果表明,无论有无光引发剂,二氧化硅-二氧化钛溶胶-凝胶薄膜对这两种光子源均具有光敏性。诱导折射率值显示出几个特征,含有光引发剂的溶胶-凝胶获得的折射率略高。利用傅里叶变换红外(FTIR)光谱讨论了紫外线和X射线诱导的聚合度,其中混合TiO-SiO层的致密化与CH=C基团的消耗以及Si-OH和Si-O-CH键的分解有关。相对于紫外线光子,X射线在致密化TiO-SiO无机和有机网络方面更有效。硬X射线光刻在强烈曝光后未观察到裂纹或损伤,可能是一种在TiO-SiO薄膜上设计亚微米结构图案以构建光学传感器的有前途的技术。