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使用棱镜耦合器测量薄膜参数。

Measurement of thin film parameters with a prism coupler.

作者信息

Ulrich R, Torge R

出版信息

Appl Opt. 1973 Dec 1;12(12):2901-8. doi: 10.1364/AO.12.002901.

Abstract

The prism coupler, known from experiments on integrated optics, can be used to determine the refractive index and the thickness of a light-guiding thin film. Both parameters are obtained simultaneously and with good accuracy by measuring the coupling angles at the prism and fitting them by a theoretical dispersion curve. The fundamentals and limitations. of this method are discussed, its practical use, and mathematical procedures for the evaluation.

摘要

棱镜耦合器在集成光学实验中已为人所知,可用于确定导光薄膜的折射率和厚度。通过测量棱镜处的耦合角并将其与理论色散曲线拟合,可同时高精度地获得这两个参数。本文讨论了该方法的基本原理和局限性、实际应用以及评估的数学程序。

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