Agarwal Aanchal, Tien Wei-Yang, Huang Yu-Sheng, Mishra Ragini, Cheng Chang-Wei, Gwo Shangjr, Lu Ming-Yen, Chen Lih-Juann
Department of Material Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan.
Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu 30013, Taiwan.
Nanomaterials (Basel). 2020 Aug 27;10(9):1680. doi: 10.3390/nano10091680.
ZnO nanowire-based surface plasmon polariton (SPP) nanolasers with metal-insulator-semiconductor hierarchical nanostructures have emerged as potential candidates for integrated photonic applications. In the present study, we demonstrated an SPP nanolaser consisting of ZnO nanowires coupled with a single-crystalline aluminum (Al) film and a WO dielectric interlayer. High-quality ZnO nanowires were prepared using a vapor phase transport and condensation deposition process via catalyzed growth. Subsequently, prepared ZnO nanowires were transferred onto a single-crystalline Al film grown by molecular beam epitaxy (MBE). Meanwhile, a WO dielectric interlayer was deposited between the ZnO nanowires and Al film, via e-beam technique, to prevent the optical loss from dominating the metallic region. The metal-oxide-semiconductor (MOS) structured SPP laser, with an optimal WO insulating layer thickness of 3.6 nm, demonstrated an ultra-low threshold laser operation (lasing threshold of 0.79 MW cm). This threshold value was nearly eight times lower than that previously reported in similar ZnO/AlO/Al plasmonic lasers, which were ≈2.4 and ≈3 times suppressed compared to the SPP laser, with WO insulating layer thicknesses of 5 nm and 8 nm, respectively. Such suppression of the lasing threshold is attributed to the WO insulating layer, which mediated the strong confinement of the optical field in the subwavelength regime.
具有金属-绝缘体-半导体分级纳米结构的基于氧化锌纳米线的表面等离激元极化激元(SPP)纳米激光器已成为集成光子应用的潜在候选者。在本研究中,我们展示了一种由氧化锌纳米线与单晶铝(Al)膜和WO介质中间层耦合而成的SPP纳米激光器。通过催化生长,利用气相传输和冷凝沉积工艺制备了高质量的氧化锌纳米线。随后,将制备好的氧化锌纳米线转移到通过分子束外延(MBE)生长的单晶Al膜上。同时,通过电子束技术在氧化锌纳米线和Al膜之间沉积WO介质中间层,以防止光损耗在金属区域占主导地位。金属-氧化物-半导体(MOS)结构的SPP激光器,其最佳WO绝缘层厚度为3.6 nm,表现出超低阈值激光运行(激射阈值为0.79 MW/cm²)。该阈值比之前在类似的ZnO/Al₂O₃/Al等离激元激光器中报道的值低近八倍,与SPP激光器相比,当WO绝缘层厚度分别为5 nm和8 nm时,激射阈值分别被抑制了约2.4倍和3倍。激射阈值的这种抑制归因于WO绝缘层,它在亚波长范围内介导了光场的强限制。