Gu Bongjun, Ko Dongwook, Jo Sungjin, Hyun Dong Choon, Oh Hyeon-Ju, Kim Jongbok
Department of Materials Science and Engineering, Kumoh National Institute of Technology, Gumi, Gyeongbuk 39177, Korea.
Department of Energy Engineering Convergence, Kumoh National Institute of Technology, Gumi, Gyeongbuk 39177, Korea.
Materials (Basel). 2020 Sep 1;13(17):3852. doi: 10.3390/ma13173852.
Wrinkles attract significant attention due to their ability to enhance the mechanical and optical characteristics of various optoelectronic devices. We report the effect of the plasma gas type, power, flow rate, and treatment time on the wrinkle features. When an optical adhesive was treated using a low-pressure plasma of oxygen, argon, and nitrogen, the oxygen and argon plasma generated wrinkles with the lowest and highest wavelengths, respectively. The increase in the power of the nitrogen and oxygen plasma increased the wavelengths and heights of the wrinkles; however, the increase in the power of the argon plasma increased the wavelengths and decreased the heights of the wrinkles. Argon molecules are heavier and smaller than nitrogen and oxygen molecules that have similar weights and sizes; moreover, the argon plasma comprises positive ions while the oxygen and nitrogen plasma comprise negative ions. This resulted in differences in the wrinkle features. It was concluded that a combination of different plasma gases could achieve exclusive control over either the wavelength or the height and allow a thorough analysis of the correlation between the wrinkle features and the characteristics of the electronic devices.
皱纹因其能够增强各种光电器件的机械和光学特性而备受关注。我们报告了等离子体气体类型、功率、流速和处理时间对皱纹特征的影响。当使用氧气、氩气和氮气的低压等离子体处理光学粘合剂时，氧气和氩气等离子体分别产生了波长最短和最长的皱纹。氮气和氧气等离子体功率的增加会增加皱纹的波长和高度；然而，氩气等离子体功率的增加会增加皱纹的波长并减小其高度。氩分子比具有相似重量和尺寸的氮分子和氧分子更重且更小；此外，氩等离子体包含正离子，而氧和氮等离子体包含负离子。这导致了皱纹特征的差异。得出的结论是，不同等离子体气体的组合可以实现对波长或高度的独家控制，并允许对皱纹特征与电子器件特性之间的相关性进行深入分析。
