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基于紫外线光刻技术的氮化铝(AlN)基光固化分散体的陶瓷制造(UV-LCM)

Ultraviolet Lithography-Based Ceramic Manufacturing (UV-LCM) of the Aluminum Nitride (AlN)-Based Photocurable Dispersions.

作者信息

Ożóg Paulina, Rutkowski Paweł, Kata Dariusz, Graule Thomas

机构信息

Laboratory for High Performance Ceramics, Empa Swiss Federal Laboratories for Materials Science and Technology, Überlandstrasse 129, 8600 Dübendorf, Switzerland.

Faculty of Materials Science and Ceramics, AGH University of Science and Technology, al. Adama Mickiewicza 30, 30-059 Cracow, Poland.

出版信息

Materials (Basel). 2020 Sep 23;13(19):4219. doi: 10.3390/ma13194219.

Abstract

In this work, three-dimensional (3D) shaping of aluminum nitride (AlN) UV-curable dispersions using CeraFab 7500 device equipped with the light engine emitting 365 nm wavelength (a UV-LCM device) is presented. The purpose of this study was the shaping of AlN pieces with microchannels for the future potential use as microchannel heat exchangers. The dispersions were characterized by the means of the particle size distribution, rheological measurements, and the cure depth evaluation. In shaping via UV-LCM, we applied dispersions containing 40 vol % solid load and different types of photoinitiators and their concentrations, as well as different settings of the printing parameters. Cuboidal plates with channels and cylindrical 3D structures were fabricated, debound, and sintered. For comparing ceramics properties, reference samples were prepared via uniaxial and cold isostatic pressing, using the same powder mixture as in the dispersions, and later sintered. The thermal conductivity of the sintered specimens was calculated, based on density and thermal diffusivity measurements.

摘要

在这项工作中,展示了使用配备发射365nm波长光引擎的CeraFab 7500设备(一种紫外光固化成型设备)对氮化铝(AlN)紫外光固化分散体进行三维(3D)成型。本研究的目的是成型带有微通道的AlN部件,以供未来作为微通道热交换器的潜在用途。通过粒度分布、流变学测量和固化深度评估等手段对分散体进行了表征。在通过紫外光固化成型过程中,我们应用了固体含量为40体积%的分散体、不同类型的光引发剂及其浓度,以及不同的打印参数设置。制造了带有通道的长方体板和圆柱形3D结构,进行脱脂和烧结。为了比较陶瓷性能,使用与分散体中相同的粉末混合物,通过单轴压制和冷等静压制备了参考样品,随后进行烧结。基于密度和热扩散率测量计算了烧结试样的热导率。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78d5/7579482/090dfab9da55/materials-13-04219-g001.jpg

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