Zhang Jie, Khalifa Adam, Spetalnick Samuel, Alemohammad Milad, Rattray John, Thakur Chetan Singh, Eisape Adebayo, Etienne-Cummings Ralph
Annu Int Conf IEEE Eng Med Biol Soc. 2020 Jul;2020:3403-3406. doi: 10.1109/EMBC44109.2020.9175405.
Optical recording of genetically encoded calcium indicator (GECI) allows neuroscientists to study the activity of genetically labeled neuron populations, but our current tools lack the resolution, stability and are often too invasive. Here we present the design concepts, prototypes, and preliminary measurement results of a super-miniaturized wireless image sensor built using a 32nm Silicon-on-Insulator process. SOI process is optimal for wireless applications, and we can further thin the substrate to reduce overall device thickness to ~25μm and operate the pixels using back-side illumination. The proposed device is 300μm × 300μm. Our prototype is built on a 3 × 3mm die.
对基因编码钙指示剂（GECI）进行光学记录，可让神经科学家研究基因标记神经元群体的活动，但我们目前的工具缺乏分辨率、稳定性，而且往往侵入性过大。在此，我们展示了一款采用32纳米绝缘体上硅工艺制造的超小型无线图像传感器的设计理念、原型及初步测量结果。绝缘体上硅工艺最适合无线应用，我们可以进一步减薄衬底，将器件整体厚度减小至约25微米，并通过背照式来操作像素。所提出的器件尺寸为300微米×300微米。我们的原型基于一个3×3毫米的芯片制成。
