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超精密轴类零件确定性加工中的频域分析与精度实现

Frequency Domain Analysis and Precision Realization in Deterministic Figuring of Ultra-Precision Shaft Parts.

作者信息

Sun Zizhou, Hu Hao, Dai Yifan, Guan Chaoliang, Tie Guipeng, Ou Yang

机构信息

College of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, China.

Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China.

出版信息

Materials (Basel). 2020 Oct 14;13(20):4561. doi: 10.3390/ma13204561.

DOI:10.3390/ma13204561
PMID:33066486
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7602269/
Abstract

An aerostatic spindle is a core component in ultra-precision machine tools. The rotor of the spindle has extremely high manufacturing accuracy, which cannot be directly achieved via traditional machining, but always via manual grinding. The deterministic figuring theory is introduced into the machining of shaft parts, which overcomes many shortcomings of manual grinding. The manufacturing error of the shaft's surface contains different frequency components, which have different effects on its working performance and the figuring process. Because the deterministic figuring method can only correct the error within a limited frequency range, in order to ensure high efficiency and high precision of the figuring process, we need to use reasonable filtering parameters to filter out the error with unnecessary frequencies. In this paper, the influence of contour error with different frequencies and amplitudes on the air film are analyzed using computational fluid dynamics (CFD) software, and the amplitude-frequency analysis as a function of the power spectral density (PSD) characteristic curve is used to study the filtering parameters of the measured data. After the figuring experiment using the filtering parameters obtained from the analysis, the average roundness of the shaft converged from 0.419 μm to 0.101 μm, and the cylindricity converged from 0.76 μm to 0.35 μm. The precision reached the level of manual grinding, which proves the rationality of the analysis using filtering parameters in a shaft's deterministic figuring.

摘要

空气静压主轴是超精密机床的核心部件。主轴的转子具有极高的制造精度，无法通过传统加工直接实现，而总是通过手工磨削来实现。将确定性修形理论引入轴类零件加工中，克服了手工磨削的诸多缺点。轴表面的制造误差包含不同频率成分，它们对其工作性能和修形过程有不同影响。由于确定性修形方法只能在有限频率范围内校正误差，为确保修形过程的高效率和高精度，需要使用合理的滤波参数滤除具有不必要频率的误差。本文利用计算流体动力学（CFD）软件分析了不同频率和幅值的轮廓误差对气膜的影响，并采用基于功率谱密度（PSD）特性曲线的幅值-频率分析来研究测量数据的滤波参数。使用从分析中获得的滤波参数进行修形实验后，轴的平均圆度从0.419μm收敛到0.101μm，圆柱度从0.76μm收敛到0.35μm。精度达到了手工磨削的水平，证明了在轴的确定性修形中使用滤波参数进行分析的合理性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af3d/7602269/8008b51dac3a/materials-13-04561-g014.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af3d/7602269/8008b51dac3a/materials-13-04561-g014.jpg

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本文引用的文献

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Research on Deterministic Figuring of Ultra-Precision Shaft Parts Based on Analysis and Control of Figuring Ability.基于加工能力分析与控制的超精密轴类零件确定性加工研究
Materials (Basel). 2020 May 28;13(11):2458. doi: 10.3390/ma13112458.
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Experimental power spectral density analysis for mid- to high-spatial frequency surface error control.用于中高空间频率表面误差控制的实验功率谱密度分析。
Appl Opt. 2017 Jun 20;56(18):5258-5267. doi: 10.1364/AO.56.005258.
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Optimization of computer controlled polishing.计算机控制抛光的优化
使用气动量仪对圆柱表面进行快速精确的非接触测量。
Materials (Basel). 2021 Jul 2;14(13):3728. doi: 10.3390/ma14133728.
Appl Opt. 1977 Jan 1;16(1):218-24. doi: 10.1364/AO.16.000218.