Wang Xin, Liu Qiang, Zhou Hao, He Zhiping, Shu Rong
Appl Opt. 2020 Oct 1;59(28):8987-8996. doi: 10.1364/AO.402451.
A plane wave aspheric surfaces test is simpler and easier to assemble than a spherical wave test. An optical system combining Dall with Offner null compensation using a plane wave is proposed for measuring large-aperture and large-relative-aperture aspheric concave surfaces. One back compensation lens and one front compensation lens are used in the system, which can realize a high-precision null test. Based on the third-order aberration theory, the normalized theoretical parameters are calculated by formula derivation, and then are optimized after analysis. The design characteristic is compared with the classical plane wave Offner null test. A prototype experiment of the proposed method is carried out with a parabolic mirror of 500 mm diameter, at relative aperture 1/1, showing that RMS surface error of /40 can be obtained.
平面波非球面检测比球面波检测更简单且易于组装。提出了一种将多尔（Dall）与奥夫纳（Offner）零位补偿相结合的光学系统，该系统使用平面波来测量大口径和大相对孔径的非球面凹面。该系统采用一个后补偿透镜和一个前补偿透镜，可实现高精度的零位检测。基于三阶像差理论，通过公式推导计算归一化理论参数，然后进行分析优化。将该设计特点与经典的平面波奥夫纳零位检测进行了比较。利用直径500mm、相对孔径为1/1的抛物面镜对所提方法进行了原型实验，结果表明可获得均方根表面误差为λ/40。
