Ye Lu, Wang Wei, Zhang Xiangchao, Xu Min, Zhang Jinping, Zheng Liehua
Appl Opt. 2020 May 20;59(15):4577-4582. doi: 10.1364/AO.388276.
The measurement of aspheric surfaces is very difficult and challenging. An optical system with a single coated lens is proposed for measuring large-aperture aspheric convex/concave surfaces. In this system, the first surface of the compensator is used as an auto-collimation surface, which can realize high-precision null compensation. Based on the third-order aberration theory, the initial design parameters of the system are obtained by analytical calculation, and the parameters are then optimized numerically. An oblate spheroid with an equivalent aperture of 426 mm is taken as an example, and the measuring accuracy of the proposed method can achieve 0.0063 rms.
非球面的测量非常困难且具有挑战性。提出了一种采用单镀膜透镜的光学系统来测量大口径非球面凸/凹面。在该系统中，补偿器的第一面用作自准直面，可实现高精度零位补偿。基于三阶像差理论，通过解析计算得到系统的初始设计参数，然后对这些参数进行数值优化。以等效口径为426 mm的扁球体为例，该方法的测量精度可达0.0063 rms。
