Qu Tianliang, Zhou Guanqing, Xue Xiaoming, Teng Junhua
School of Information Science and Technology, Dalian Maritime University, Dalian 116026, China.
College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha 410073, China.
Sensors (Basel). 2020 Oct 22;20(21):5972. doi: 10.3390/s20215972.
A cylindrical shell piezoelectric vibration gyroscope is a kind of Coriolis vibration gyroscope. Its core components are the cylindrical quartz resonator (CQR) and the piezoelectric ceramic electrodes (PCEs). In order to develop a high-precision Cylindrical shell piezoelectric vibration gyroscope, it is very important to reduce the influence of the PCEs and obtain a high-quality-factor CQR. To achieve this goal, a novel high-temperature sintering method is proposed to combine the CQR and the PCEs, and the corresponding sintered resonators are fabricated. After sintering, results of the acoustic excitation experiment and piezoelectric excitation experiment are tested, and the influence of the sintered PCEs on the CQR is determined. A complete gyroscope is obtained by vacuum packaging the sintered resonator. Through the open-loop and closed-loop tests, the performance parameters of gyroscope are obtained. The feasibility of the high-temperature sintering method is proved by experiments.
圆柱形壳体压电振动陀螺仪是一种科里奥利振动陀螺仪。其核心部件是圆柱形石英谐振器（CQR）和压电陶瓷电极（PCE）。为了研制出高精度的圆柱形壳体压电振动陀螺仪，减少压电陶瓷电极的影响并获得高品质因数的圆柱形石英谐振器非常重要。为实现这一目标，提出了一种新颖的高温烧结方法来结合圆柱形石英谐振器和压电陶瓷电极，并制造出相应的烧结谐振器。烧结后，测试了声激励实验和压电激励实验的结果，并确定了烧结后的压电陶瓷电极对圆柱形石英谐振器的影响。通过对烧结谐振器进行真空封装得到了完整的陀螺仪。通过开环和闭环测试，获得了陀螺仪的性能参数。实验证明了高温烧结方法的可行性。
