作为角速率传感器的振动挠曲电微梁
Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors.
作者信息
Qu Yilin, Jin Feng, Yang Jiashi
机构信息
State Key Laboratory for Strength and Vibration of Mechanical Structures, Xi'an Jiaotong University, Xi'an 710049, China.
Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588-0526, USA.
出版信息
Micromachines (Basel). 2022 Aug 2;13(8):1243. doi: 10.3390/mi13081243.
We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.
我们研究了围绕其轴旋转的微梁在垂直方向上的挠曲电激发/检测弯曲振动。推导了一组一维方程并将其用于理论分析。结果表明，与自旋相关的科里奥利效应在其较小时会产生与自旋角速率成正比的电输出。因此，该梁可用作角速率传感的陀螺仪。与传统的压电梁陀螺仪相比，本文提出并分析的挠曲电梁结构更简单。
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