Li Jun, Liu Ying, Wei Su-Fen, Shan Chan
Quanzhou Institute of Equipment Manufacturing, Haixi Institute, Chinese Academy of Sciences, Quanzhou 362216, China.
Department of Computer, Quanzhou College of Technology, Quanzhou 362200, China.
Micromachines (Basel). 2020 Oct 27;11(11):960. doi: 10.3390/mi11110960.
In this paper, we present an in-built N pocket electrically doped tunnel FET (ED-TFET) based on the polarity bias concept that enhances the DC and analog/RF performance. The proposed device begins with a MOSFET like structure (n-p-n) with a control gate (CG) and a polarity gate (PG). The PG is biased at -0.7 V to induce a P region at the source side, leaving an N pocket between the source and the channel. This technique yields an N pocket that is realized in the in-built architecture and removes the need for additional chemical doping. Calibrated 2-D simulations have demonstrated that the introduction of the N pocket yields a higher and a steeper average subthreshold swing when compared to conventional ED-TFET. Further, a local minimum on the conduction band edge () curve at the tunneling junction is observed, leading to a dramatic reduction in the tunneling width. As a result, the in-built N pocket ED-TFET significantly improves the DC and analog/RF figure-of-merits and, hence, can serve as a better candidate for low-power applications.
在本文中,我们基于极性偏置概念提出了一种内置N口袋的电掺杂隧道场效应晶体管(ED-TFET),该概念可增强直流和模拟/射频性能。所提出的器件起始于具有控制栅极(CG)和极性栅极(PG)的类似MOSFET的结构(n-p-n)。PG被偏置在-0.7V,以在源极侧诱导出一个P区域,在源极和沟道之间留下一个N口袋。这种技术产生了一个在内置架构中实现的N口袋,并且无需额外的化学掺杂。经过校准的二维模拟表明,与传统的ED-TFET相比,N口袋的引入产生了更高的峰值和更陡峭的平均亚阈值摆幅。此外,在隧道结处的导带边缘()曲线上观察到一个局部最小值,导致隧道宽度显著减小。因此,内置N口袋的ED-TFET显著改善了直流和模拟/射频品质因数,从而可以作为低功耗应用的更好候选者。