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无在线冷却过程的玻璃微棱镜阵列热压印理论与实验研究

Theoretical and Experimental Study on Hot-Embossing of Glass-Microprism Array without Online Cooling Process.

作者信息

Hu Manfeng, Xie Jin, Li Wei, Niu Yuanhang

机构信息

School of Mechatronic Engineering and Automation, Foshan University, Foshan 528225, China.

School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 510640, China.

出版信息

Micromachines (Basel). 2020 Oct 31;11(11):984. doi: 10.3390/mi11110984.

Abstract

Optical glass-microprism arrays are generally embossed at high temperatures, so an online cooling process is needed to remove thermal stress, but this make the cycle long and its equipment expensive. Therefore, the hot-embossing of a glass-microprism array at a low strain rate with reasonable embossing parameters was studied, aiming at reducing thermal stress and realizing its rapid microforming without online cooling process. First, the flow-field, strain-rate, and deformation behavior of glass microforming were simulated. Then, the low-cost microforming control device was designed, and the silicon carbide (SiC) die-core microgroove array was microground by the grinding-wheel microtip. Lastly, the effect of the process parameters on forming rate was studied. Results showed that the appropriate embossing parameters led to a low strain rate; then, the trapezoidal glass-microprism array could be formed without an online cooling process. The standard deviation of the theoretical and experimental forming rates was only 7%, and forming rate increased with increasing embossing temperature, embossing force, and holding duration, but cracks and adhesion occurred at a high embossing temperature and embossing force. The highest experimental forming rate reached 66.56% with embossing temperature of 630 °C, embossing force of 0.335 N, and holding duration of 12 min.

摘要

光学玻璃微棱镜阵列通常在高温下压花,因此需要在线冷却过程来消除热应力,但这会使周期变长且设备昂贵。因此,研究了在合理的压花参数下以低应变速率对玻璃微棱镜阵列进行热压花,旨在降低热应力并在无在线冷却过程的情况下实现其快速微成型。首先,模拟了玻璃微成型的流场、应变速率和变形行为。然后,设计了低成本的微成型控制装置,并通过砂轮微尖对碳化硅(SiC)模芯微槽阵列进行了微磨削。最后,研究了工艺参数对成型速率的影响。结果表明,合适的压花参数导致低应变速率;然后,可以在无在线冷却过程的情况下形成梯形玻璃微棱镜阵列。理论和实验成型速率的标准偏差仅为7%,成型速率随压花温度、压花力和保压时间的增加而增加,但在高压花温度和压花力下会出现裂纹和粘连。在压花温度为630℃、压花力为0.335N、保压时间为12min时,最高实验成型速率达到66.56%。

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