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不稳定空气折射率导致的四自由度测量系统的漂移减小

Drift Reduction of a 4-DOF Measurement System Caused by Unstable Air Refractive Index.

作者信息

Li Ruijun, Wang Yongjun, Tao Pan, Cheng Rongjun, Cheng Zhenying, Wei Yongqing, Dang Xueming

机构信息

School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China.

出版信息

Sensors (Basel). 2020 Nov 6;20(21):6329. doi: 10.3390/s20216329.

DOI:10.3390/s20216329
PMID:33171985
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7664201/
Abstract

Laser beam drift greatly influences the accuracy of a four degrees of freedom (4-DOF) measurement system during the detection of machine tool errors, especially for long-distance measurement. A novel method was proposed using bellows to serve as a laser beam shield and air pumps to stabilize the refractive index of air. The inner diameter of the bellows and the control mode of the pumps were optimized through theoretical analysis and simulation. An experimental setup was established to verify the feasibility of the method under the temperature interference condition. The results indicated that the position stability of the laser beam spot can be improved by more than 79% under the action of pumping and inflating. The proposed scheme provides a cost-effective method to reduce the laser beam drift, which can be applied to improve the detection accuracy of a 4-DOF measurement system.

摘要

在机床误差检测过程中,激光束漂移对四自由度(4-DOF)测量系统的精度有很大影响,尤其是对于远距离测量。提出了一种新颖的方法,使用波纹管作为激光束屏蔽装置,并使用气泵来稳定空气的折射率。通过理论分析和仿真对波纹管的内径和气泵的控制模式进行了优化。建立了实验装置以验证该方法在温度干扰条件下的可行性。结果表明,在抽气和充气作用下,激光束光斑的位置稳定性可提高79%以上。所提出的方案提供了一种经济有效的方法来减少激光束漂移,可应用于提高四自由度测量系统的检测精度。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/46b57052b583/sensors-20-06329-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/f6957719c356/sensors-20-06329-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/9fe4aeda1724/sensors-20-06329-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/3f26370d1a0a/sensors-20-06329-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/b255f6356f3b/sensors-20-06329-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/b5a342099a01/sensors-20-06329-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/23fd57a67e4d/sensors-20-06329-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/861455a00d31/sensors-20-06329-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/9adc99d2e5bf/sensors-20-06329-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/b0622397ad86/sensors-20-06329-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/457d054f9295/sensors-20-06329-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/4cb5b83b186e/sensors-20-06329-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/46b57052b583/sensors-20-06329-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/f6957719c356/sensors-20-06329-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/9fe4aeda1724/sensors-20-06329-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/3f26370d1a0a/sensors-20-06329-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/b255f6356f3b/sensors-20-06329-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/b5a342099a01/sensors-20-06329-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/23fd57a67e4d/sensors-20-06329-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/861455a00d31/sensors-20-06329-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/9adc99d2e5bf/sensors-20-06329-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/b0622397ad86/sensors-20-06329-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/457d054f9295/sensors-20-06329-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/4cb5b83b186e/sensors-20-06329-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/46b57052b583/sensors-20-06329-g012.jpg

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本文引用的文献

1
A Fiber-Optic Gas Sensor and Method for the Measurement of Refractive Index Dispersion in NIR.一种用于测量近红外区域折射率色散的光纤气体传感器及方法。
Sensors (Basel). 2020 Jul 2;20(13):3717. doi: 10.3390/s20133717.
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Linear Displacement Calibration System Integrated with a Novel Auto-Alignment Module for Optical Axes.线性位移校准系统与新型自动对准模块集成,用于光学轴。
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High-Sensitivity, Large Dynamic Range Refractive Index Measurement Using an Optical Microfiber Coupler.
利用光纤耦合器实现高灵敏度、大动态范围折射率测量。
Sensors (Basel). 2019 Nov 21;19(23):5078. doi: 10.3390/s19235078.
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Low cost, compact 4-DOF measurement system with active compensation of beam angular drift error.具有光束角漂移误差主动补偿功能的低成本紧凑型四自由度测量系统。
Opt Express. 2018 Jun 25;26(13):17185-17198. doi: 10.1364/OE.26.017185.
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A heterodyne straightness and displacement measuring interferometer with laser beam drift compensation for long-travel linear stage metrology.一种用于长行程线性平台计量的具有激光束漂移补偿功能的外差式直线度和位移测量干涉仪。
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Compensation of errors due to incident beam drift in a 3 DOF measurement system for linear guide motion.用于直线导轨运动的三自由度测量系统中因入射光束漂移导致的误差补偿。
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