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不稳定空气折射率导致的四自由度测量系统的漂移减小

Drift Reduction of a 4-DOF Measurement System Caused by Unstable Air Refractive Index.

作者信息

Li Ruijun, Wang Yongjun, Tao Pan, Cheng Rongjun, Cheng Zhenying, Wei Yongqing, Dang Xueming

机构信息

School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China.

出版信息

Sensors (Basel). 2020 Nov 6;20(21):6329. doi: 10.3390/s20216329.

Abstract

Laser beam drift greatly influences the accuracy of a four degrees of freedom (4-DOF) measurement system during the detection of machine tool errors, especially for long-distance measurement. A novel method was proposed using bellows to serve as a laser beam shield and air pumps to stabilize the refractive index of air. The inner diameter of the bellows and the control mode of the pumps were optimized through theoretical analysis and simulation. An experimental setup was established to verify the feasibility of the method under the temperature interference condition. The results indicated that the position stability of the laser beam spot can be improved by more than 79% under the action of pumping and inflating. The proposed scheme provides a cost-effective method to reduce the laser beam drift, which can be applied to improve the detection accuracy of a 4-DOF measurement system.

摘要

在机床误差检测过程中,激光束漂移对四自由度(4-DOF)测量系统的精度有很大影响,尤其是对于远距离测量。提出了一种新颖的方法,使用波纹管作为激光束屏蔽装置,并使用气泵来稳定空气的折射率。通过理论分析和仿真对波纹管的内径和气泵的控制模式进行了优化。建立了实验装置以验证该方法在温度干扰条件下的可行性。结果表明,在抽气和充气作用下,激光束光斑的位置稳定性可提高79%以上。所提出的方案提供了一种经济有效的方法来减少激光束漂移,可应用于提高四自由度测量系统的检测精度。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c56e/7664201/f6957719c356/sensors-20-06329-g001.jpg

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