Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China.
Sensors (Basel). 2019 Sep 5;19(18):3833. doi: 10.3390/s19183833.
A robust laser measurement system (LMS), consisting of a sensor head and a detecting part, for simultaneously measuring five-degree-of-freedom (five-DOF) error motions of linear stages, is proposed and characterized. For the purpose of long-travel measurement, all possible error sources that would affect the measurement accuracy are considered. This LMS not only integrates the merits of error compensations for the laser beam drift, beam spot variation, detector sensitivity variation, and non-parallelism of dual-beam that have been resolved by the author's group before, but also eliminates the crosstalk errors among five-DOF error motions in this study. The feasibility and effectiveness of the designed LMS and modified measurement model are experimentally verified using a laboratory-built prototype. The experimental results show that the designed LSM has the capability of simultaneously measuring the five-DOF error motions of a linear stage up to one-meter travel with a linear error accuracy in sub-micrometer and an angular error accuracy in sub-arcsecond after compensation.
提出并分析了一种由传感器头和检测部分组成的稳健激光测量系统（LMS），用于同时测量线性台的五自由度（5-DOF）误差运动。为了实现长行程测量，考虑了所有可能影响测量精度的误差源。该 LMS 不仅集成了作者之前解决的激光束漂移、光斑变化、探测器灵敏度变化以及双光束非平行度的误差补偿的优点，而且还消除了本研究中五自由度误差运动之间的串扰误差。使用实验室构建的原型，通过实验验证了所设计的 LMS 和改进的测量模型的可行性和有效性。实验结果表明，设计的 LSM 具有在补偿后以亚微米级的线性误差精度和亚弧秒级的角度误差精度测量长达一米行程的线性台的五个自由度误差运动的能力。
