基于散斑扫描技术的定量X射线通道切割晶体衍射波前计量学

Quantitative X-ray Channel-Cut Crystal Diffraction Wavefront Metrology Using the Speckle Scanning Technique.

作者信息

Xue Lian, Luo Hongxin, Diao Qianshun, Yang Fugui, Wang Jie, Li Zhongliang

机构信息

Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201800, China.

Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Sensors (Basel). 2020 Nov 20;20(22):6660. doi: 10.3390/s20226660.

DOI:10.3390/s20226660

PMID:33233739

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7699849/

Abstract

A speckle-based method for the X-ray crystal diffraction wavefront measurement is implemented, and the slope errors of channel-cut crystals with different surface characteristics are measured. The method uses a speckle scanning technique generated by a scattering membrane translated using a piezo motor to infer the deflection of X-rays from the crystals. The method provides a high angular sensitivity of the channel-cut crystal slopes in both the tangential and sagittal directions. The experimental results show that the slope error of different cutting and etching processes ranges from 0.25 to 2.98 μrad. Furthermore, the results of wavefront deformation are brought into the beamline for simulation. This method opens up possibilities for new high-resolution applications for X-ray crystal diffraction wavefront measurement and provides feedback to crystal manufacturers to improve channel-cut fabrication.

摘要

实现了一种基于散斑的X射线晶体衍射波前测量方法，并测量了具有不同表面特性的沟道切晶体的斜率误差。该方法利用由压电电机平移的散射膜产生的散斑扫描技术来推断晶体中X射线的偏转。该方法在切向和矢状方向上对沟道切晶体斜率具有高角度灵敏度。实验结果表明，不同切割和蚀刻工艺的斜率误差范围为0.25至2.98微弧度。此外，将波前变形结果带入光束线进行模拟。该方法为X射线晶体衍射波前测量的新高分辨率应用开辟了可能性，并为晶体制造商提供反馈以改进沟道切制造工艺。