Fan Shuming, Gou Jun, Niu Qingchen, Xie Zheyuan, Wang Jun
School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 610054, China.
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, China.
Nanoscale Res Lett. 2020 Dec 3;15(1):223. doi: 10.1186/s11671-020-03454-2.
In this paper, a periodic structure based on metallic split-ring resonators is integrated into micro-bridge structures of THz microbolometer array to achieve high THz wave absorption in a wide frequency range. With a small unit size of 35 μm × 35 μm, the effect of split-ring structure on THz wave absorption characteristics of the multilayer structure array is studied to manipulate the resonance absorption frequencies. The absorption bandwidth is effectively increased by integrating a combined structure of split-ring and metallic disk. Broadband THz absorption is formed by coupling the absorption peaks of different structures. The periodic structure of dual-ring combined with a metallic disk provides a broadband THz wave absorption in the range of 4-7 THz. The highest absorption in the band reaches 90% and the lowest absorption is higher than 40%. The designed structure is process-compatible and easy to implement for small-pixel THz microbolometers with high absorption in a wide spectrum range. The research provides a scheme for broadband THz sensing and real-time imaging at room temperature.
在本文中，一种基于金属开口环谐振器的周期性结构被集成到太赫兹微测辐射热计阵列的微桥结构中，以在宽频率范围内实现高太赫兹波吸收。该结构单元尺寸小，仅为35μm×35μm，研究了开口环结构对多层结构阵列太赫兹波吸收特性的影响，以调控共振吸收频率。通过集成开口环与金属圆盘的组合结构，有效增加了吸收带宽。不同结构的吸收峰相互耦合，形成了宽带太赫兹吸收。双环与金属圆盘相结合的周期性结构在4 - 7太赫兹范围内提供了宽带太赫兹波吸收。该频段内最高吸收率达到90%，最低吸收率高于40%。所设计的结构与工艺兼容，易于应用于在宽光谱范围内具有高吸收率的小像素太赫兹微测辐射热计。该研究为室温下的宽带太赫兹传感和实时成像提供了一种方案。
