Toral Victor, Loghin Florin C, Rodríguez-Diéguez Antonio, Lapresta-Fernández Alejandro, Morales Diego P, Rivadeneyra Almudena, Salinas-Castillo Alfonso
Department of Electronics and Computer Technology, University of Granada, 18071 Granada, Spain.
Institute for Nanoelectronics, Technical University of Munich, 80333 Munich, Germany.
Sensors (Basel). 2020 Dec 7;20(23):6981. doi: 10.3390/s20236981.
In this letter, we present the extension of a previous work on a cost-effective method for fabricating highly sensitive humidity sensors on flexible substrates with a reversible response, allowing precise monitoring of the humidity threshold. In that work we demonstrated the use of three-dimensional metal-organic framework (MOF) film deposition based on the perylene-3,4,9,10-tetracarboxylate linker, potassium as metallic center and the interspacing of silver interdigitated electrodes (IDEs) as humidity sensors. In this work, we study one of the most important issues in efficient and reproducible mass production, which is to optimize the most important processes' parameters in their fabrication, such as controlling the thickness of the sensor's layers. We demonstrate this method not only allows for the creation of humidity sensors, but it also is possible to change the humidity value that changes the actuator state.
在这封信中，我们展示了之前一项工作的扩展，该工作涉及一种经济高效的方法，用于在具有可逆响应的柔性基板上制造高灵敏度湿度传感器，从而能够精确监测湿度阈值。在那项工作中，我们展示了基于苝-3,4,9,10-四羧酸连接体、钾作为金属中心以及银叉指电极（IDEs）间距的三维金属有机框架（MOF）薄膜沉积作为湿度传感器的应用。在这项工作中，我们研究了高效且可重复大规模生产中最重要的问题之一，即优化其制造过程中最重要的工艺参数，例如控制传感器层的厚度。我们证明这种方法不仅能够制造湿度传感器，还能够改变湿度值以改变致动器状态。
