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基于丝网印刷TiO₂纳米颗粒作为敏感层的柔性小型化湿度传感器的制备与表征

Fabrication and Characterization of Flexible and Miniaturized Humidity Sensors Using Screen-Printed TiO₂ Nanoparticles as Sensitive Layer.

作者信息

Dubourg Georges, Segkos Apostolos, Katona Jaroslav, Radović Marko, Savić Slavica, Niarchos Georgios, Tsamis Christos, Crnojević-Bengin Vesna

机构信息

Nano and Microelectronics Group, BioSense Institute, 21000 Novi Sad, Serbia.

Institute of Nanoscience and Nanotechnology, NCSR "Demokritos", Patriarhou Gregoriou & Neapoleos, 15310 Aghia Paraskevi, Greece.

出版信息

Sensors (Basel). 2017 Aug 11;17(8):1854. doi: 10.3390/s17081854.

DOI:10.3390/s17081854
PMID:28800063
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5579961/
Abstract

This paper describes the fabrication and the characterization of an original example of a miniaturized resistive-type humidity sensor, printed on flexible substrate in a large-scale manner. The fabrication process involves laser ablation for the design of interdigitated electrodes on PET (Poly-Ethylene Terephthalate) substrate and a screen-printing process for the deposition of the sensitive material, which is based on TiO₂ nanoparticles. The laser ablation process was carefully optimized to obtain micro-scale and well-resolved electrodes on PET substrate. A functional paste based on cellulose was prepared in order to allow the precise screen-printing of the TiO₂ nanoparticles as sensing material on the top of the electrodes. The current against voltage (I-V) characteristic of the sensor showed good linearity and potential for low-power operation. The results of a humidity-sensing investigation and mechanical testing showed that the fabricated miniaturized sensors have excellent mechanical stability, sensing characteristics, good repeatability, and relatively fast response/recovery times operating at room temperature.

摘要

本文描述了一种以大规模方式印刷在柔性基板上的小型化电阻式湿度传感器的制造及特性。制造过程包括在聚对苯二甲酸乙二酯（PET）基板上通过激光烧蚀设计叉指电极，以及通过丝网印刷工艺沉积基于二氧化钛纳米颗粒的敏感材料。对激光烧蚀工艺进行了精心优化，以便在PET基板上获得微米级且分辨率良好的电极。制备了一种基于纤维素的功能浆料，以便能够在电极顶部精确地丝网印刷二氧化钛纳米颗粒作为传感材料。传感器的电流-电压（I-V）特性显示出良好的线性以及低功耗运行的潜力。湿度传感研究和机械测试结果表明，所制造的小型化传感器具有出色的机械稳定性、传感特性、良好的重复性，并且在室温下运行时响应/恢复时间相对较快。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/5220061a0102/sensors-17-01854-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/d5ef204468cb/sensors-17-01854-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/87910e6bc26e/sensors-17-01854-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/5aab8334ec0b/sensors-17-01854-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/d1d15c15c4e6/sensors-17-01854-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/05c8bee5a3b2/sensors-17-01854-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/9b5ae1bcf8a2/sensors-17-01854-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/e4a0c1e0b23e/sensors-17-01854-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/7c540a7bf37c/sensors-17-01854-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/5220061a0102/sensors-17-01854-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/d5ef204468cb/sensors-17-01854-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/87910e6bc26e/sensors-17-01854-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/5aab8334ec0b/sensors-17-01854-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/d1d15c15c4e6/sensors-17-01854-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/05c8bee5a3b2/sensors-17-01854-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/9b5ae1bcf8a2/sensors-17-01854-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/e4a0c1e0b23e/sensors-17-01854-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/7c540a7bf37c/sensors-17-01854-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2b8a/5579961/5220061a0102/sensors-17-01854-g009.jpg

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