Buzzin Alessio, Cupo Serena, Giovine Ennio, de Cesare Giampiero, Belfiore Nicola Pio
Department of Information Engineering, Electronics and Telecommunications, University of Rome La Sapienza, 00184 Rome, Italy.
Department of Engineering, University of Roma Tre, 00146 Rome, Italy.
Micromachines (Basel). 2020 Dec 8;11(12):1087. doi: 10.3390/mi11121087.
This paper presents the development of a multi-hinge, multi-DoF (Degrees of Freedom) nanogripper actuated by means of rotary comb drives and equipped with CSFH (Conjugate Surface Flexure Hinges), with the goal of performing complex in-plane movements at the nanoscale. The design approach, the simulation and a specifically conceived single-mask fabrication process are described in detail and the achieved results are illustrated by SEM images. The first prototype presents a total overall area of (550 × 550) μm2, an active clamping area of (2 × 4) μm2, 600 nm-wide circular curved beams as flexible hinges for its motion and an aspect ratio of about 2.5. These features allow the proposed system to grasp objects a few hundred nanometers in size.
本文介绍了一种由旋转梳状驱动器驱动、配备共轭表面柔性铰链的多铰链、多自由度纳米夹钳的开发，其目标是在纳米尺度上执行复杂的平面内运动。详细描述了设计方法、模拟以及专门设计的单掩膜制造工艺，并通过扫描电子显微镜图像展示了所取得的结果。第一个原型的总面积为(550×550)μm²，有效夹持面积为(2×4)μm²，600nm宽的圆形弯曲梁作为其运动的柔性铰链，长宽比约为2.5。这些特性使所提出的系统能够抓取尺寸为几百纳米的物体。
