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用于空间应用的MEMS陀螺仪的热真空稳定性研究

Consideration of Thermo-Vacuum Stability of a MEMS Gyroscope for Space Applications.

作者信息

Liu Jili, Fu Mingrui, Meng Chao, Li Jianpeng, Li Kai, Hu Jun, Chen Xiaojuan

机构信息

Science and Technology on Space Intelligent Control Laboratory, Beijing Institute of Control Engineering, Beijing 100194, China.

出版信息

Sensors (Basel). 2020 Dec 15;20(24):7172. doi: 10.3390/s20247172.

Abstract

Thermo-vacuum stability of the aerospace gyroscopes is one of the crucial issues in the harsh and remote environment of space. This paper reports a bias drift compensation algorithm for the MEMS (microelectromechanical systems) gyroscope with atmosphere package. This approach takes advantage of linear frequency-temperature dependence and linear amplitude-pressure dependence for self-compensation of the gyroscope bias drifts in real-time. The dependences were analyzed and evaluated by subjecting the gyroscope to a thermo-vacuum condition. The real-time self-compensation yielded a total bias error of 0.01°/s over a temperature range of 7-45 °C. A MEMS rate sensor was flown in space and the on-orbit data also verify the effectiveness of the approach.

摘要

在恶劣且偏远的太空环境中,航空航天陀螺仪的热真空稳定性是关键问题之一。本文报道了一种针对带大气封装的MEMS(微机电系统)陀螺仪的偏置漂移补偿算法。该方法利用线性频率 - 温度依赖性和线性幅度 - 压力依赖性,对陀螺仪的偏置漂移进行实时自补偿。通过使陀螺仪处于热真空条件下,对这些依赖性进行了分析和评估。在7至45°C的温度范围内,实时自补偿产生的总偏置误差为0.01°/秒。一个MEMS速率传感器被送入太空,在轨数据也验证了该方法的有效性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/35a1/7765107/56549d58430a/sensors-20-07172-g001.jpg

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