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基于薄膜铌酸锂波导的金属光栅耦合器。

Metal based grating coupler on a thin-film lithium niobate waveguide.

作者信息

Ruan Ziliang, Hu Jinyao, Xue Yu, Liu Jie, Chen Bin, Wang Jingyi, Chen Kaixuan, Chen Pengxin, Liu Liu

出版信息

Opt Express. 2020 Nov 23;28(24):35615-35621. doi: 10.1364/OE.411284.

Abstract

Thin-film lithium niobate (LN) has been proved to be an excellent platform for building compact active and nonlinear photonic components on a chip. The coupling of a sub-micron sized LN waveguide and a single-mode fiber remains as one challenging issue. An efficient grating coupler made of Au stripes on an LN ridge waveguide is demonstrated here. The fabrication of the grating is convenient, using just a standard lift-off process of metal films. The peak coupling efficiency of an optimized structure reaches 50.4%, i.e., -3 dB coupling loss, at 1.55 µm wavelength for the fundamental transverse-electrical mode, where the 1-dB coupling bandwidth is 58 nm. Experimentally, fabricated devices, with buried oxide layer thicknesses slightly off the optimal values, exhibit coupling efficiencies of 43.8% and 33.7% for 400 nm and 600 nm thick LN layers.

摘要

薄膜铌酸锂(LN)已被证明是在芯片上构建紧凑型有源和非线性光子组件的理想平台。亚微米尺寸的LN波导与单模光纤的耦合仍然是一个具有挑战性的问题。本文展示了一种由LN脊形波导上的金条纹制成的高效光栅耦合器。光栅的制造很方便,只需使用标准的金属膜剥离工艺。对于基模横向电模,在1.55 µm波长下,优化结构的峰值耦合效率达到50.4%,即-3 dB耦合损耗,其中1-dB耦合带宽为58 nm。实验中,对于400 nm和600 nm厚的LN层,掩埋氧化物层厚度略偏离最佳值的制造器件的耦合效率分别为43.8%和33.7%。

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