Piyush P, Jayanth G R
Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore 560012, India.
Rev Sci Instrum. 2020 Dec 1;91(12):126101. doi: 10.1063/5.0015051.
This note presents an optical beam deflection-based measurement system to make multi-axis out-of-plane motion measurement at multiple points on both micro- and macro-scale targets. A novel automated calibration stage has been designed to change the measurement locations on the target and to calibrate the sensitivity matrix of the measurement system at each location. The developed measurement system is validated by measuring the rigid body rotation of a target, after which its utility is demonstrated by performing dynamic characterization of a micro-electro-mechanical system micro-cantilever beam in order to obtain its first two mode shapes.
