Kim Seonggi, Jung Youngdo, Oh Sunjong, Moon Hyungpil, Lim Hyuneui
Department of Nature-Inspired Nanoconvergence Systems, Korea Institute of Machinery and Materials, Daejeon, Korea.
School of Mechanical Engineering, Sungkyunkwan University, Suwon, Korea.
Soft Robot. 2022 Feb;9(1):119-127. doi: 10.1089/soro.2020.0051. Epub 2021 Jan 11.
In this study, a parasitic capacitance-free tactile sensor with a floating electrode that is capable of identifying actual physical contact pressure by distinguishing from parasitic effects and applicable to sensor arrays is presented. Although capacitive pressure sensors are known for their excellent pressure sensing capabilities in wide range with high sensitivity, they tend to suffer from a parasitic capacitance noise and unwanted proximity effects. Electromagnetic interference shielding was conventionally used to prevent this noise; however, it was not entirely successful in multicell array sensors. Parasitic capacitance-free method involves the use of a floating electrode, which functions as a contact trigger by causing sudden changes in capacitance only when the actual physical contact pressure has been applied or removed. The proposed method is robust, consistent, and precise. Experimental results show a wide range of pressure response up to 2.4 MPa with a sensitivity of 0.179 MPa (up to 0.74 MPa) and negligible hysteresis.
在本研究中，提出了一种具有浮动电极的无寄生电容触觉传感器，该传感器能够通过区分寄生效应来识别实际的物理接触压力，并且适用于传感器阵列。尽管电容式压力传感器以其在宽范围内具有高灵敏度的出色压力传感能力而闻名，但它们往往会受到寄生电容噪声和不必要的邻近效应的影响。传统上使用电磁干扰屏蔽来防止这种噪声；然而，在多单元阵列传感器中，这并不完全成功。无寄生电容方法涉及使用浮动电极，该电极仅在施加或去除实际物理接触压力时通过引起电容的突然变化来充当接触触发器。所提出的方法稳健、一致且精确。实验结果表明，压力响应范围高达2.4MPa，灵敏度为0.179MPa（高达0.74MPa），滞后可忽略不计。
