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纳米压印光刻技术在高度微型化光学光谱仪中的作用。

Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers.

作者信息

Hillmer Hartmut, Woidt Carsten, Istock André, Kobylinskiy Aliaksei, Nguyen Duc Toan, Ahmed Naureen, Brunner Robert, Kusserow Thomas

机构信息

Institute of Nanostructure Technologies and Analytics (INA) and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, 34132 Kassel, Germany.

Applied Optics, Department SciTec, University of Applied Sciences Jena, Carl-Zeiss-Promenade 2, 07745 Jena, Germany.

出版信息

Nanomaterials (Basel). 2021 Jan 11;11(1):164. doi: 10.3390/nano11010164.

DOI:10.3390/nano11010164
PMID:33440826
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7827089/
Abstract

Optical spectrometers and sensors have gained enormous importance in metrology and information technology, frequently involving the question of size, resolution, sensitivity, spectral range, efficiency, reliability, and cost. Nanomaterials and nanotechnological fabrication technologies have huge potential to enable an optimization between these demands, which in some cases are counteracting each other. This paper focuses on the visible and near infrared spectral range and on five types of optical sensors (optical spectrometers): classical grating-based miniaturized spectrometers, arrayed waveguide grating devices, static Fabry-Pérot (FP) filter arrays on sensor arrays, tunable microelectromechanical systems (MEMS) FP filter arrays, and MEMS tunable photonic crystal filters. The comparison between this selection of concepts concentrates on (i) linewidth and resolution, (ii) required space for a selected spectral range, (iii) efficiency in using available light, and (iv) potential of nanoimprint for cost reduction and yield increase. The main part of this review deals with our own results in the field of static FP filter arrays and MEMS tunable FP filter arrays. In addition, technology for efficiency boosting to get more of the available light is demonstrated.

摘要

光学光谱仪和传感器在计量学和信息技术领域已变得极为重要，常常涉及尺寸、分辨率、灵敏度、光谱范围、效率、可靠性和成本等问题。纳米材料和纳米技术制造工艺具有巨大潜力，能够在这些有时相互矛盾的需求之间实现优化。本文聚焦于可见光和近红外光谱范围以及五种光学传感器（光学光谱仪）：基于经典光栅的小型化光谱仪、阵列波导光栅器件、传感器阵列上的静态法布里 - 珀罗（FP）滤波器阵列、可调谐微机电系统（MEMS）FP滤波器阵列以及MEMS可调谐光子晶体滤波器。对这些概念的比较集中在以下几个方面：（i）线宽和分辨率；（ii）选定光谱范围所需的空间；（iii）利用可用光的效率；（iv）纳米压印在降低成本和提高产量方面的潜力。本综述的主要部分涉及我们在静态FP滤波器阵列和MEMS可调谐FP滤波器阵列领域的自身研究成果。此外，还展示了提高效率以获取更多可用光的技术。

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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c709/7827089/97ad54da08d3/nanomaterials-11-00164-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c709/7827089/bd70b7560477/nanomaterials-11-00164-g008.jpg
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