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基于毫米高的自立式碳纳米管的高深宽比微电极阵列的制造

Fabrication of High Aspect Ratio Millimeter-Tall Free-Standing Carbon Nanotube-Based Microelectrode Arrays.

作者信息

Chen Guohai, Dodson Berg, Hedges David M, Steffensen Scott C, Harb John N, Puleo Chris, Galligan Craig, Ashe Jeffrey, Vanfleet Richard R, Davis Robert C

机构信息

Department of Physics and Astronomy, Brigham Young University, Provo, Utah 84602, United States.

Department of Psychology and Neuroscience, Brigham Young University, Provo, Utah 84602, United States.

出版信息

ACS Biomater Sci Eng. 2018 May 14;4(5):1900-1907. doi: 10.1021/acsbiomaterials.8b00038. Epub 2018 Apr 9.

DOI:10.1021/acsbiomaterials.8b00038
PMID:33445345
Abstract

Microelectrode arrays of carbon nanotube (CNT)/carbon composite posts with high aspect ratio and millimeter-length were fabricated using carbon-nanotube-templated microfabrication with a sacrificial "hedge". The high aspect ratio, mechanical robustness, and electrical conductivity of these electrodes make them a potential candidate for next-generation neural interfacing. Electrochemical measurements were also demonstrated using an individual CNT post microelectrode with a diameter of 25 μm and a length of 1 mm to perform cyclic voltammetry on both methyl viologen and dopamine in a phosphate-buffered saline solution. In addition to detection of the characteristic peaks, the CNT post microelectrodes show a fast electrochemical response, which may be enabling for in vivo and/or in vitro measurements. The CNT post electrode fabrication process was also integrated with other microfabrication techniques, resulting in individually addressable electrodes.

摘要

利用具有牺牲性“树篱”的碳纳米管模板微加工技术,制备了具有高纵横比和毫米级长度的碳纳米管(CNT)/碳复合柱微电极阵列。这些电极的高纵横比、机械鲁棒性和导电性使其成为下一代神经接口的潜在候选者。还展示了使用直径为25μm、长度为1mm的单个CNT柱微电极在磷酸盐缓冲盐溶液中对甲基紫精和多巴胺进行循环伏安法的电化学测量。除了检测特征峰外,CNT柱微电极还显示出快速的电化学响应,这可能有利于体内和/或体外测量。CNT柱电极制造工艺还与其他微加工技术集成,从而得到可单独寻址的电极。

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