Institute of Biomedical Engineering, Chinese Academy of Medical Sciences and Peking Union Medical College, No. 236 Baidi Road, Nankai District, Tianjin, 300192, China.
Department of Electronic Engineering, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong, China.
Biomed Eng Online. 2019 Aug 1;18(1):86. doi: 10.1186/s12938-019-0704-8.
Microelectrode arrays play an important role in prosthetic implants for neural signal recording or applying electrical pulses stimulation to target nerve system. Safety and long-term reliability are essential requirements for microelectrode arrays applied in electrical stimulation. In design and fabrication of the microelectrode array, soft materials are generally chosen to be the substrate for the aim of achieving better compliance with the surrounding tissue while maintaining minimal damage. By flexing of the array to the surface, the array is capable of keeping a more stable electrical contact resulting in a significantly improved signal detected.
In this study, we design and fabricate a flexible microelectrode array with gold as the electrode material and parylene-C as the substrate. The fabrication process of the array is presented. The in vitro electrochemical characteristics of the microelectrode are investigated by electrochemical impedance spectroscopy and cyclic voltammetry in a three-electrode electrochemical cell containing phosphate-buffered saline. Charge injection capacity measurements are carried out by multichannel systems and the CSC of the microarray is calculated.
Electrochemical results showed that impedance decreased with frequency. The average impedance of the Au electrodes at 1 kHz was 36.54 ± 0.88 kΩ. The average phase angle at 1 kHz was - 73.52 ± 1.3°, and the CIC of the microelectrode was 22.3 µC/cm. The results demonstrated that the microelectrode array performed as expected for neuronal signal recording or stimulation.
With parylene-C as the substrate, the microarray has good flexibility. The electrochemical characteristics' results show that the array has the ability to resist any corrosion on metal-electrolyte interface and has good biocompatibility. This low-cost, flexible parylene-based, gold microelectrode array shows potential for use in implant neurological signal acquisition or neurostimulation applications.
微电极阵列在神经信号记录或向目标神经系统施加电脉冲刺激的假肢植入物中起着重要作用。应用于电刺激的微电极阵列的安全性和长期可靠性是基本要求。在微电极阵列的设计和制造中,通常选择软材料作为基底,以实现更好地顺应周围组织,同时保持最小的损伤。通过微电极阵列的弯曲贴合表面,该阵列能够保持更稳定的电接触,从而显著提高检测到的信号。
在本研究中,我们设计并制造了一种由金作为电极材料和聚对二甲苯-C 作为基底的柔性微电极阵列。介绍了阵列的制造工艺。通过在含有磷酸盐缓冲盐水的三电极电化学电池中进行电化学阻抗谱和循环伏安法,研究了微电极的体外电化学特性。通过多通道系统进行电荷注入容量测量,并计算微阵列的 CSC。
电化学结果表明,阻抗随频率降低而降低。Au 电极在 1 kHz 时的平均阻抗为 36.54 ± 0.88 kΩ。在 1 kHz 时的平均相角为-73.52 ± 1.3°,微电极的 CIC 为 22.3 µC/cm。结果表明,微电极阵列能够实现神经元信号记录或刺激的预期功能。
以聚对二甲苯-C 为基底,微阵列具有良好的柔韧性。电化学特性结果表明,该阵列具有抵抗金属-电解质界面腐蚀的能力,具有良好的生物相容性。这种低成本、柔性的基于聚对二甲苯的金微电极阵列在植入式神经信号采集或神经刺激应用中具有应用潜力。