National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan.
Microscopy (Oxf). 2021 Aug 9;70(4):353-360. doi: 10.1093/jmicro/dfab003.
This paper presents a quick and straightforward method to evaluate image distortion in scanning electron microscopy using a certified reference material (CRM) as a test specimen. The CRM has a square dot-array structure, whose dot-pitch has an accredited value. By calculating the distance between each dot of the CRM via image analysis, we can detect the distortion in the image as variations of dot interval. Furthermore, by considering the uncertainty of the certified value, it is possible to quantitatively evaluate the significance of the distortion in the image. This method enables us to easily estimate the uncertainty from image distortion, which can improve the reliability of measurement by scanning electron microscopy.
本文提出了一种快速而直接的方法，使用经过认证的参考材料（CRM）作为测试样本来评估扫描电子显微镜中的图像失真。该 CRM 具有正方形点阵列结构，其点距具有公认的值。通过通过图像分析计算 CRM 中每个点之间的距离，我们可以检测到图像中的失真，因为点间隔发生了变化。此外，通过考虑认证值的不确定性，可以定量评估图像失真的重要性。该方法使我们能够轻松估计图像失真的不确定度，从而提高扫描电子显微镜测量的可靠性。
