Itoh Nobuyasu, Hanari Nobuyasu
National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki, 305-8563, Japan.
Anal Sci. 2020 Aug 10;36(8):1009-1013. doi: 10.2116/analsci.20P046. Epub 2020 Mar 20.
Confocal Raman microscopes are widely used in various applications because they provide physical and chemical information at a submicron scale. A high lateral resolution in the confocal Raman microscope is essential for obtaining high-quality images. We used an array of tungsten dots at a 600 nm pitch on a Si substrate of the certified reference material (NMIJ CRM 5207-a) to reliably evaluate the lateral resolution of a confocal Raman microscope at various pinhole sizes. The precision of the mapping scale in the x- and y-pitches was confirmed from Si signal profiles, and the lateral resolution was evaluated by a straight-edge method using scale indicators in the reference material. Because these procedures are applicable to other confocal Raman microscopes with popular specifications (532 nm laser, 100× objective lens, numerical aperture 0.9, step size 0.1 μm), they are suitable for both a reliable evaluation of the lateral resolution of a confocal Raman microscope and for daily checks on the precision of its mapping scale.
共焦拉曼显微镜因其能在亚微米尺度提供物理和化学信息而被广泛应用于各种领域。共焦拉曼显微镜中的高横向分辨率对于获得高质量图像至关重要。我们在经认证的参考材料（NMIJ CRM 5207-a）的硅衬底上使用了间距为600 nm的钨点阵列，以可靠地评估共焦拉曼显微镜在各种针孔尺寸下的横向分辨率。通过硅信号轮廓确认了x和y间距中映射比例的精度，并使用参考材料中的比例指标通过直边法评估横向分辨率。由于这些程序适用于具有常见规格（532 nm激光、100×物镜、数值孔径0.9、步长0.1 μm）的其他共焦拉曼显微镜，它们既适用于可靠评估共焦拉曼显微镜的横向分辨率，也适用于日常检查其映射比例的精度。
