Su Yue, Geng Zhaoxin, Fang Weihao, Lv Xiaoqing, Wang Shicai, Ma Zhengtai, Pei Weihua
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China.
Micromachines (Basel). 2021 Jan 24;12(2):121. doi: 10.3390/mi12020121.
Nanoimprint technology is powerful for fabricating nanostructures in a large area. However, expensive equipment, high cost, and complex process conditions hinder the application of nano-imprinting technology. Therefore, double-layer self-priming nanoimprint technology was proposed to fabricate ordered metal nanostructures uniformly on 4-inch soft and hard substrates without the aid of expensive instruments. Different nanostructure (gratings, nanoholes and nanoparticles) and different materials (metal and MoS) were patterned, which shows wide application of double-layer self-priming nanoimprint technology. Moreover, by a double-layer system, the width and the height of metal can be adjusted through the photoresist thickness and developing condition, which provide a programmable way to fabricate different nanostructures using a single mold. The double-layer self-priming nanoimprint method can be applied in poor condition without equipment and be programmable in nanostructure parameters using a single mold, which reduces the cost of instruments and molds.
纳米压印技术在大面积制造纳米结构方面具有强大功能。然而，昂贵的设备、高昂的成本和复杂的工艺条件阻碍了纳米压印技术的应用。因此，提出了双层自吸式纳米压印技术，无需借助昂贵仪器即可在4英寸软硬基板上均匀制造有序金属纳米结构。对不同的纳米结构（光栅、纳米孔和纳米颗粒）和不同的材料（金属和MoS）进行了图案化处理，这表明双层自吸式纳米压印技术具有广泛的应用前景。此外，通过双层系统，可以通过光刻胶厚度和显影条件来调节金属的宽度和高度，这为使用单个模具制造不同的纳米结构提供了一种可编程的方法。双层自吸式纳米压印方法可以在无设备的恶劣条件下应用，并且使用单个模具在纳米结构参数方面具有可编程性，这降低了仪器和模具的成本。
