Zhang Qiaozhen, Chen Zhenglin, Chen Yanguang, Dong Jiahe, Tang Panliang, Fu Sulei, Wu Haodong, Ma Jinyi, Zhao Xiangyong
College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai 200234, China.
China Electronics Technology Group Corporation No.26 Research Institute (SIPAT), Chongqing 400060, China.
Micromachines (Basel). 2021 Jan 28;12(2):141. doi: 10.3390/mi12020141.
Radio-frequency (RF) surface acoustic wave (SAW) resonators used as filters and duplexers are mass-produced and widely used in current mobile phones. With the numerous emergences of the diverse device structure, a universal method used for the accurate and fast simulation of the SAW resonator calls for urgent demand. However, there are too many instances where the behavior of the entire acoustic resonator cannot be characterized rapidly and efficiently due to limitations in the current computer memory and speed. This is especially true for SAW resonators configured with long arrays of inter-digital transducers (IDTs), and we have to resort to a periodic analysis. In this paper, the previously reported generalized partial differential equations (PDE) based on the two-dimensional finite element method (2D-FEM) model is extended to analysis for the periodic structure of the SAW resonator. We present model order reduction (MOR) techniques based on FEM and periodic boundary conditions to achieve a dimensionally reduced PDE model without decreasing the accuracy of computations. Examples of different SAW devices, including the regular SAW, IHP-SAW and TC-SAW resonators, are provided which shows the results of the periodic analysis compared with the experimental results of the actual resonators. The investigation results demonstrate the properties of the proposed methodology and prove its effectiveness and accuracy.
用作滤波器和双工器的射频（RF）表面声波（SAW）谐振器已实现大规模生产，并广泛应用于当前的移动电话中。随着各种不同器件结构的大量涌现，迫切需要一种用于准确快速模拟SAW谐振器的通用方法。然而，由于当前计算机内存和速度的限制，存在太多情况使得整个声学谐振器的行为无法快速有效地进行表征。对于配置有长叉指换能器（IDT）阵列的SAW谐振器而言尤其如此，我们不得不采用周期分析方法。在本文中，基于二维有限元方法（2D-FEM）模型的先前报道的广义偏微分方程（PDE）被扩展用于SAW谐振器周期结构的分析。我们提出基于有限元法和周期边界条件的模型降阶（MOR）技术，以实现降维的PDE模型，同时不降低计算精度。提供了不同SAW器件的示例，包括常规SAW、IHP-SAW和TC-SAW谐振器，展示了周期分析结果与实际谐振器实验结果的对比。研究结果证明了所提出方法的特性，并证实了其有效性和准确性。
