用于航空航天应用的基于铌酸锂的L波段声表面波谐振器的制造。

Fabrications of L-band LiNbO-based SAW Resonators for Aerospace Applications.

作者信息

Hu Baofa, Zhang Shaoda, Zhang Hong, Lv Wenlong, Zhang Chunquan, Lv Xueqin, San Haisheng

机构信息

Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China.

Shenzhen Research Institute of Xiamen University, Shenzhen 518000, China.

出版信息

Micromachines (Basel). 2019 May 28;10(6):349. doi: 10.3390/mi10060349.

DOI:10.3390/mi10060349

PMID:31141949

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6630977/

Abstract

High frequency surface acoustic wave (SAW) technology offers many opportunities for aerospace applications in passive wireless sensing and communication. This paper presents the design, simulation, fabrication, and test of an -band SAW resonator based on 128° Y-X LiNbO substrate. The design parameters of SAW resonator were optimized by the finite element (FEM) method and the coupling-of-mode (COM) theory. Electron-beam lithography (EBL) technology was used to fabricate the submicron-scale of interdigital transducers (IDTs) and grating reflectors. The effects of some key EBL processes (e.g., the use of electron beam resist, the choice of metal deposition methods, the charge-accumulation effect, and the proximity-effect) on the fabrication precision of SAW devices were discussed. Experimentally, the LiNbO-based SAW resonators fabricated using improved EBL technology exhibits a Rayleigh wave resonance peaks at 1.55 GHz with return loss about -12dB, and quality factor Q is 517. Based on this SAW resonator, the temperature and strain sensing tests were performed, respectively. The experimental results exhibit a well linear dependence of temperature/strain on frequency-shift, with a temperature sensitivity of 125.4 kHz/C and a strain sensitivity of -831 Hz/με, respectively.

摘要

高频表面声波（SAW）技术为航空航天领域的无源无线传感与通信应用提供了诸多机遇。本文介绍了一种基于128°Y-X LiNbO 衬底的 - 波段SAW谐振器的设计、仿真、制造与测试。通过有限元（FEM）方法和模式耦合（COM）理论对SAW谐振器的设计参数进行了优化。采用电子束光刻（EBL）技术制造了亚微米级的叉指换能器（IDT）和光栅反射器。讨论了一些关键的EBL工艺（如电子束抗蚀剂的使用、金属沉积方法的选择、电荷积累效应和邻近效应）对SAW器件制造精度的影响。实验结果表明，采用改进的EBL技术制造的基于LiNbO的SAW谐振器在1.55 GHz处呈现瑞利波共振峰，回波损耗约为 -12dB，品质因数Q为517。基于该SAW谐振器，分别进行了温度和应变传感测试。实验结果表明，温度/应变与频移具有良好的线性相关性，温度灵敏度分别为125.4 kHz/°C，应变灵敏度为 -831 Hz/με。