Moy Aurélien, Fournelle John
Department of Geoscience, University of Wisconsin, Madison, WI53706, USA.
Microsc Microanal. 2021 Apr;27(2):266-283. doi: 10.1017/S1431927620024915.
Electron probe microanalysis is a nondestructive technique widely used to determine the elemental composition of bulk samples. This was extended to layered specimens, with the development of appropriate software. The traditional quantification method requires the use of matrix correction procedures based upon models of the ionization depth distribution, the so-called ϕ(ρz) distribution. Most of these models have led to commercial quantification programs but only few of them allow the quantification of layered specimens. Therefore, we developed BadgerFilm, a free open-source thin film program available to the general public. This program implements a documented ϕ(ρz) model as well as algorithms to calculate fluorescence in bulk and thin film samples. Part 1 of the present work aims at describing the operation of the implemented ϕ(ρz) distribution model and validating its implementation against experimental measurements and Monte Carlo simulations on bulk samples. The program has the ability to predict absolute X-ray intensities that can be directly compared to Monte Carlo simulations. We demonstrate that the implemented model works very well for bulk materials. And as will be shown in Part 2, BadgerFilm predictions for thin film specimens are also shown to be in good agreements with experimental and Monte Carlo results.
电子探针微分析是一种广泛用于确定块状样品元素组成的无损技术。随着合适软件的开发，该技术被扩展到分层样品。传统的定量方法需要使用基于电离深度分布模型（即所谓的ϕ(ρz)分布）的基体校正程序。这些模型大多已应用于商业定量程序，但其中只有少数允许对分层样品进行定量。因此，我们开发了BadgerFilm，这是一个可供公众使用的免费开源薄膜程序。该程序实现了一个有文档记录的ϕ(ρz)模型以及用于计算块状和薄膜样品中荧光的算法。本工作的第1部分旨在描述所实现的ϕ(ρz)分布模型的运行情况，并通过对块状样品的实验测量和蒙特卡罗模拟来验证其实现。该程序能够预测可直接与蒙特卡罗模拟进行比较的绝对X射线强度。我们证明所实现的模型对块状材料非常有效。如第2部分所示，BadgerFilm对薄膜样品的预测也与实验和蒙特卡罗结果高度吻合。
