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1064纳米波长下溅射涂层的激光诱导层剥离

Laser-induced layers peeling of sputtering coatings at 1064 nm wavelength.

作者信息

Guo Kesheng, Wang Yanzhi, Chen Ruiyi, Zhang Yuhui, Sytchkova Anna, Zhu Meiping, Yi Kui, He Hongbo, Shao Jianda

机构信息

Laboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Shanghai, 201800, China.

Ji Hua Laboratory, Foshan, 528000, China.

出版信息

Sci Rep. 2021 Feb 12;11(1):3783. doi: 10.1038/s41598-020-80304-2.

Abstract

Large-scale layers peeling after the laser irradiation of dual ion beam sputtering coatings is discovered and a model is established to explain it. The laser damage morphologies relate to the laser fluence, showing thermomechanical coupling failure at low energy and coating layers separation at high energy. High-pressure gradients appear in the interaction between laser and coatings, resulting in large-scale layer separation. A two-step laser damage model including defect-induced damage process and ionized air wave damage process is proposed to explain the two phenomena at different energy. At relatively high energies (higher than 20 J/cm), ionization of the air can be initiated, leading to a peeling off effect. The peeling effect is related to the thermomechanical properties of the coating materials.

摘要

发现了双离子束溅射涂层激光辐照后出现的大规模层剥离现象,并建立了一个模型来解释这一现象。激光损伤形态与激光能量密度有关,在低能量时表现为热机械耦合失效,在高能量时表现为涂层分层。激光与涂层相互作用中出现高压梯度,导致大规模层分离。提出了一个两步激光损伤模型,包括缺陷诱导损伤过程和电离空气波损伤过程,以解释不同能量下的两种现象。在相对较高的能量(高于20 J/cm)下,可以引发空气电离,导致剥离效应。剥离效应与涂层材料的热机械性能有关。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ca8f/7881021/f3fdc11e0d08/41598_2020_80304_Fig1_HTML.jpg

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