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用于材料评估的扫描声学显微镜

Scanning acoustic microscopy for material evaluation.

作者信息

Yu Hyunung

机构信息

Korea Research Institute of Science and Standards, Daejeon, 34113, South Korea.

出版信息

Appl Microsc. 2020 Nov 5;50(1):25. doi: 10.1186/s42649-020-00045-4.

Abstract

Scanning acoustic microscopy (SAM) or Acoustic Micro Imaging (AMI) is a powerful, non-destructive technique that can detect hidden defects in elastic and biological samples as well as non-transparent hard materials. By monitoring the internal features of a sample in three-dimensional integration, this technique can efficiently find physical defects such as cracks, voids, and delamination with high sensitivity. In recent years, advanced techniques such as ultrasound impedance microscopy, ultrasound speed microscopy, and scanning acoustic gigahertz microscopy have been developed for applications in industries and in the medical field to provide additional information on the internal stress, viscoelastic, and anisotropic, or nonlinear properties. X-ray, magnetic resonance, and infrared techniques are the other competitive and widely used methods. However, they have their own advantages and limitations owing to their inherent properties such as different light sources and sensors.This paper provides an overview of the principle of SAM and presents a few results to demonstrate the applications of modern acoustic imaging technology. A variety of inspection modes, such as vertical, horizontal, and diagonal cross-sections have been presented by employing the focus pathway and image reconstruction algorithm. Images have been reconstructed from the reflected echoes resulting from the change in the acoustic impedance at the interface of the material layers or defects. The results described in this paper indicate that the novel acoustic technology can expand the scope of SAM as a versatile diagnostic tool requiring less time and having a high efficiency.

摘要

扫描声学显微镜(SAM)或声学显微成像(AMI)是一种强大的无损技术,可检测弹性和生物样本以及不透明硬质材料中的隐藏缺陷。通过在三维整合中监测样本的内部特征,该技术能够以高灵敏度高效地发现诸如裂纹、空洞和分层等物理缺陷。近年来,诸如超声阻抗显微镜、超声速度显微镜和扫描声学千兆赫兹显微镜等先进技术已被开发出来,用于工业和医疗领域,以提供有关内部应力、粘弹性、各向异性或非线性特性的更多信息。X射线、磁共振和红外技术是其他具有竞争力且广泛使用的方法。然而,由于它们诸如不同光源和传感器等固有特性,它们各有优缺点。本文概述了SAM的原理,并给出了一些结果以展示现代声学成像技术的应用。通过采用聚焦路径和图像重建算法,呈现了多种检测模式,如垂直、水平和对角横截面。图像已根据材料层或缺陷界面处声阻抗变化产生的反射回波进行重建。本文所述结果表明,这种新型声学技术可扩展SAM作为一种通用诊断工具的范围,所需时间更少且效率更高。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d703/7818342/042febff192f/42649_2020_45_Sch1_HTML.jpg

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