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应用于扫描声学显微镜系统的高频聚焦换能器新型水听器：模拟与实验研究

Novel Water Probe for High-Frequency Focused Transducer Applied to Scanning Acoustic Microscopy System: Simulation and Experimental Investigation.

作者信息

Pham Van Hiep, Tran Le Hai, Choi Jaeyeop, Truong Hoanh-Son, Vo Tan Hung, Vu Dinh Dat, Park Sumin, Oh Junghwan

机构信息

Faculty of Mechanical Engineering and Mechatronics, PHENIKAA University, Yen Nghia, Ha Dong, Hanoi 12116, Vietnam.

PHENIKAA Research and Technology Institute (PRATI), A&A Green Phoenix Group JSC, No.167 Hoang Ngan, Trung Hoa, Cau Giay, Hanoi 11313, Vietnam.

出版信息

Sensors (Basel). 2024 Aug 10;24(16):5179. doi: 10.3390/s24165179.

DOI:10.3390/s24165179
PMID:39204875
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11359672/
Abstract

A scanning acoustic microscopy (SAM) system is a common non-destructive instrument which is used to evaluate the material quality in scientific and industrial applications. Technically, the tested sample is immersed in water during the scanning process. Therefore, a robot arm is incorporated into the SAM system to transfer the sample for in-line inspection, which makes the system complex and increases time consumption. The main aim of this study is to develop a novel water probe for the SAM system, that is, a waterstream. During the scanning process, water was supplied using a waterstream instead of immersing the sample in the water, which leads to a simple design of an automotive SAM system and a reduction in time consumption. In addition, using a waterstream in the SAM system can avoid contamination of the sample due to immersion in water for long-time scanning. Waterstream was designed based on the measured focal length calculation of the transducer and simulated to investigate the internal flow characteristics. To validate the simulation results, the waterstream was prototyped and applied to the TSAM-400 and W-FSAM traditional and fast SAM systems to successfully image some samples such as carbon fiber-reinforced polymers, a printed circuit board, and a 6-inch wafer. These results demonstrate the design method of the water probe applied to the SAM system.

摘要

扫描声学显微镜（SAM）系统是一种常见的无损检测仪器，用于科学和工业应用中的材料质量评估。从技术上讲，在扫描过程中，被测样品需浸没在水中。因此，SAM系统中配备了一个机器人手臂来转移样品进行在线检测，这使得系统变得复杂且增加了时间消耗。本研究的主要目的是为SAM系统开发一种新型水探头，即水流探头。在扫描过程中，使用水流来供应水，而不是将样品浸没在水中，这使得汽车SAM系统的设计变得简单，并减少了时间消耗。此外，在SAM系统中使用水流可以避免由于长时间浸没在水中进行扫描而导致的样品污染。水流探头是根据换能器的测量焦距计算设计的，并进行了模拟以研究内部流动特性。为了验证模拟结果，制作了水流探头的原型，并将其应用于TSAM-400和W-FSAM传统和快速SAM系统，成功地对一些样品进行了成像，如碳纤维增强聚合物、印刷电路板和6英寸晶圆。这些结果证明了应用于SAM系统的水探头的设计方法。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/d9ce6035fdba/sensors-24-05179-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/fc3d8e283666/sensors-24-05179-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/aa255368776f/sensors-24-05179-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/056c44492403/sensors-24-05179-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/90cb52cfbb1e/sensors-24-05179-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/949c54f9d19c/sensors-24-05179-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/9e80bf09698f/sensors-24-05179-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/49a96dc8bf18/sensors-24-05179-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/8a460e4eaab5/sensors-24-05179-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/0bede5a35b5a/sensors-24-05179-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/409f38599963/sensors-24-05179-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/44da0bc884d1/sensors-24-05179-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/061dd29e3ba3/sensors-24-05179-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/d9ce6035fdba/sensors-24-05179-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/fc3d8e283666/sensors-24-05179-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/aa255368776f/sensors-24-05179-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/056c44492403/sensors-24-05179-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/90cb52cfbb1e/sensors-24-05179-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/949c54f9d19c/sensors-24-05179-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/9e80bf09698f/sensors-24-05179-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/49a96dc8bf18/sensors-24-05179-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/8a460e4eaab5/sensors-24-05179-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/0bede5a35b5a/sensors-24-05179-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/409f38599963/sensors-24-05179-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/44da0bc884d1/sensors-24-05179-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/061dd29e3ba3/sensors-24-05179-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c5a9/11359672/d9ce6035fdba/sensors-24-05179-g013.jpg

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