Malin L E, Graves W S, Holl M, Spence J C H, Nanni E A, Li R K, Shen X, Weathersby S
Department of Physics, Arizona State University, Tempe, AZ 85287, USA.
Department of Physics, Arizona State University, Tempe, AZ 85287, USA.
Ultramicroscopy. 2021 Apr;223:113211. doi: 10.1016/j.ultramic.2021.113211. Epub 2021 Feb 3.
Electron diffraction through a thin patterned silicon membrane can be used to create complex spatial modulations in electron distributions. By precisely varying parameters such as crystallographic orientation and wafer thickness, the intensity of reflections in the diffraction plane can be controlled and by placing an aperture to block all but one spot, we can form an image with different parts of the patterned membrane, as is done for bright-field imaging in microscopy. The patterned electron beams can then be used to control phase and amplitude of subsequent x-ray emission, enabling novel coherent x-ray methods. The electrons themselves can also be used for femtosecond time resolved diffraction and microscopy. As a first step toward patterned beams, we demonstrate experimentally and through simulation the ability to accurately predict and control diffraction spot intensities. We simulate MeV transmission electron diffraction patterns using the multislice method for various crystallographic orientations of a single crystal Si(001) membrane near beam normal. The resulting intensity maps of the Bragg reflections are compared to experimental results obtained at the Accelerator Structure Test Area Ultrafast Electron Diffraction (ASTA UED) facility at SLAC. Furthermore, the fraction of inelastic and elastic scattering of the initial charge is estimated along with the absorption of the membrane to determine the contrast that would be seen in a patterned version of the Si(001) membrane.
通过薄的图案化硅膜进行电子衍射可用于在电子分布中创建复杂的空间调制。通过精确改变诸如晶体取向和晶圆厚度等参数,可以控制衍射平面中反射的强度,并且通过放置一个孔径来阻挡除一个斑点之外的所有斑点,我们可以用图案化膜的不同部分形成图像,这与显微镜中的明场成像所做的一样。然后,图案化的电子束可用于控制后续X射线发射的相位和幅度,从而实现新颖的相干X射线方法。电子本身也可用于飞秒时间分辨衍射和显微镜。作为迈向图案化束的第一步,我们通过实验和模拟证明了准确预测和控制衍射斑点强度的能力。我们使用多层方法模拟了MeV透射电子衍射图案,该图案是针对接近束法线的单晶Si(001)膜的各种晶体取向。将得到的布拉格反射强度图与在SLAC的加速器结构测试区域超快电子衍射(ASTA UED)设施获得的实验结果进行比较。此外,估计了初始电荷的非弹性和弹性散射分数以及膜的吸收,以确定在Si(001)膜的图案化版本中会看到的对比度。