Li Jian V
Department of Aeronautics and Astronautics, National Cheng Kung University, 1 University Road, Tainan 70101, Taiwan.
Rev Sci Instrum. 2021 Feb 1;92(2):023902. doi: 10.1063/5.0039555.
Defect characterization by deep level transient spectroscopy (DLTS) requires the extraction of two key quantities of the carrier emission rate from the defects-activation energy (E) and pre-exponential factor (ν)-the latter is related to the carrier capture cross section. This task, ubiquitous to thermally activated processes besides defect-carrier interaction, is traditionally accomplished by constructing an Arrhenius plot with DLTS peak locations and fitting it with a line. We present a transformation method based on the Arrhenius equation that extracts E and νwithout constructing or line-fitting the Arrhenius plot and bypasses peak identification. This method is developed on the basis of the fundamental temperature-rate duality relationship and extracts E and ν by matching the curvatures the Arrhenius-transformed spectra of the iso-thermal and iso-rate DLTS scans in the 2D temperature-rate plane. The extraction can be conducted with data in a small temperature range and is, therefore, capable of unambiguously resolving E and ν at any temperature point and their temperature dependence, if any.
通过深能级瞬态谱（DLTS）进行缺陷表征需要从缺陷中提取载流子发射率的两个关键量——激活能（E）和指前因子（ν），后者与载流子俘获截面有关。除了缺陷 - 载流子相互作用外，这项在热激活过程中普遍存在的任务传统上是通过用DLTS峰位置构建阿仑尼乌斯图并对其进行线性拟合来完成的。我们提出了一种基于阿仑尼乌斯方程的变换方法，该方法无需构建或对阿仑尼乌斯图进行线性拟合，也无需进行峰识别即可提取E和ν。该方法基于基本的温度 - 速率对偶关系开发，通过在二维温度 - 速率平面中匹配等温及等速率DLTS扫描的阿仑尼乌斯变换谱的曲率来提取E和ν。该提取可以在小温度范围内的数据上进行，因此能够明确解析任何温度点处的E和ν及其温度依赖性（如果有的话）。
