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通过聚焦氦离子束诱导沉积绝缘体制造的分支高纵横比纳米结构

Branched High Aspect Ratio Nanostructures Fabricated by Focused Helium Ion Beam Induced Deposition of an Insulator.

作者信息

Allen Frances I

机构信息

Department of Materials Science and Engineering, UC Berkeley, Berkeley, CA 94720, USA.

California Institute for Quantitative Biosciences, UC Berkeley, Berkeley, CA 94720, USA.

出版信息

Micromachines (Basel). 2021 Feb 25;12(3):232. doi: 10.3390/mi12030232.

DOI:10.3390/mi12030232
PMID:33668907
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7996577/
Abstract

Helium ion beam induced deposition using the gaseous precursor pentamethylcyclopentasiloxane is employed to fabricate high aspect ratio insulator nanostructures (nanopillars and nanocylinders) that exhibit charge induced branching. The branched nanostructures are analyzed by transmission electron microscopy. It is found that the side branches form above a certain threshold height and that by increasing the flow rate of the precursor, the vertical growth rate and branching phenomenon can be significantly enhanced, with fractalesque branching patterns observed. The direct-write ion beam nanofabrication technique described herein offers a fast single-step method for the growth of high aspect ratio branched nanostructures with site-selective placement on the nanometer scale.

摘要

使用气态前驱体五甲基环戊硅氧烷的氦离子束诱导沉积被用于制造具有电荷诱导分支的高深宽比绝缘体纳米结构（纳米柱和纳米圆柱体）。通过透射电子显微镜对分支纳米结构进行分析。发现侧分支在一定阈值高度以上形成，并且通过增加前驱体的流速，垂直生长速率和分支现象可以显著增强，观察到具有分形分支模式。本文所述的直写离子束纳米制造技术提供了一种快速的单步方法，用于在纳米尺度上生长具有位点选择性放置的高深宽比分支纳米结构。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/7ad9dc09ffd6/micromachines-12-00232-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/748d3f489c72/micromachines-12-00232-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/ad45466d0ae3/micromachines-12-00232-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/4246847c26a1/micromachines-12-00232-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/f667888f9dba/micromachines-12-00232-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/f1afaa52e5fc/micromachines-12-00232-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/7ad9dc09ffd6/micromachines-12-00232-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/748d3f489c72/micromachines-12-00232-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/ad45466d0ae3/micromachines-12-00232-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/4246847c26a1/micromachines-12-00232-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/f667888f9dba/micromachines-12-00232-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/f1afaa52e5fc/micromachines-12-00232-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a78/7996577/7ad9dc09ffd6/micromachines-12-00232-g006.jpg

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2
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Micromachines (Basel). 2020 May 22;11(5):527. doi: 10.3390/mi11050527.
3
Three-Dimensional Superconducting Nanohelices Grown by He-Focused-Ion-Beam Direct Writing.
Beilstein J Nanotechnol. 2021 Jul 2;12:633-664. doi: 10.3762/bjnano.12.52. eCollection 2021.
通过氦离子束直接写入生长的三维超导纳米螺旋线。
Nano Lett. 2019 Dec 11;19(12):8597-8604. doi: 10.1021/acs.nanolett.9b03153. Epub 2019 Nov 25.
4
Vertical Growth of Superconducting Crystalline Hollow Nanowires by He Focused Ion Beam Induced Deposition.通过氦离子束诱导沉积实现超导晶态空心纳米线的垂直生长。
Nano Lett. 2018 Feb 14;18(2):1379-1386. doi: 10.1021/acs.nanolett.7b05103. Epub 2018 Jan 27.
5
Bright focused ion beam sources based on laser-cooled atoms.基于激光冷却原子的明亮聚焦离子束源。
Appl Phys Rev. 2016 Mar;3(1). doi: 10.1063/1.4944491. Epub 2016 Mar 24.
6
Synthesis of nanowires via helium and neon focused ion beam induced deposition with the gas field ion microscope.利用氦气和氖气场致离子显微镜聚焦离子束诱导沉积合成纳米线。
Nanotechnology. 2013 May 3;24(17):175302. doi: 10.1088/0957-4484/24/17/175302. Epub 2013 Apr 3.
7
The influence of beam defocus on volume growth rates for electron beam induced platinum deposition.电子束诱导铂沉积中束散焦对体积增长率的影响。
Nanotechnology. 2008 Dec 3;19(48):485302. doi: 10.1088/0957-4484/19/48/485302. Epub 2008 Nov 11.
8
Nanopillar growth by focused helium ion-beam-induced deposition.纳米柱的聚焦氦离子束诱导沉积生长。
Nanotechnology. 2010 Nov 12;21(45):455302. doi: 10.1088/0957-4484/21/45/455302. Epub 2010 Oct 14.
9
Laplacian growth of amorphous carbon filaments in a non-diffusion-limited experiment.非扩散限制实验中无定形碳丝的拉普拉斯生长
Phys Rev E Stat Phys Plasmas Fluids Relat Interdiscip Topics. 1995 Nov;52(5):5156-5160. doi: 10.1103/physreve.52.5156.