用于电热应用的透明TiO/Cu/TiO多层膜

Peng Jingjing, Hao Changshan, Liu Hongyan, Yan Yue

Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System, Beijing Institute of Aeronautical Materials, Beijing 100095, China.

Materials (Basel). 2021 Feb 22;14(4):1024. doi: 10.3390/ma14041024.

Highly transparent indium-free multilayers of TiO/Cu/TiO were obtained by means of annealing. The effects of Cu thickness and annealing temperature on the electrical and optical properties were investigated. The critical thickness of Cu mid-layer with optimal electrical and optical properties was 10 nm, with the figure of merit reaching as high as 5 × 10 Ω. Partial crystallization of the TiO layer enhanced the electrical and optical properties upon annealing. Electrothermal experiments showed that temperatures of more than 100 °C can be reached at a heating rate of 2 °C/s without any damage to the multilayers. The experimental results indicate that reliable transparent TiO/Cu/TiO multilayers can be used for electrothermal application.

通过退火获得了高度透明的无铟TiO/Cu/TiO多层膜。研究了铜层厚度和退火温度对电学和光学性能的影响。具有最佳电学和光学性能的铜中间层的临界厚度为10纳米，品质因数高达5×10Ω。TiO层的部分结晶在退火时增强了电学和光学性能。电热实验表明，在2℃/s的加热速率下可以达到100℃以上的温度，而不会对多层膜造成任何损坏。实验结果表明，可靠的透明TiO/Cu/TiO多层膜可用于电热应用。