通过改变结构不均匀性增强金属玻璃薄膜的力学性能

Enhanced Mechanical Properties of Metallic Glass Thin Films via Modification of Structural Heterogeneity.

作者信息

Ma Xindi, Sun Kang, Li Peiyou, Zhang Nizhen, Wang Qing, Wang Gang

机构信息

Institute of Materials, Shanghai University, Shanghai 200444, China.

School of Materials Science and Engineering, Shaanxi University of Technology, Hanzhong 723001, China.

出版信息

Materials (Basel). 2021 Feb 20;14(4):999. doi: 10.3390/ma14040999.

DOI:10.3390/ma14040999

PMID:33672573

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7924064/

Abstract

The structure of CuZr and CoTaB metallic glass thin films (MGTF) was effectively tailored via various applied substrate temperatures by means of the magnetron sputtering technology. Obviously enhanced hardness and elastic modulus are achieved by different compositional MGTFs by increasing the substrate temperature. Compared with the CuZr MGTFs, the CoTaB MGTF deposited at 473 K displays the smaller strain-rate sensitivity exponent, , and a weaker spectrum intensity based on the nanoindentation creep test, suggesting its better creep resistance. In addition, the STZ volume of the CoTaB MGTF significantly decreases after depositing at higher temperature. According to the nano-scratch analysis, the CoTaB MGTF at the substrate temperatures of 473 K performs the shallower scratch width and the larger / value, indicating its better tribological property.

摘要

通过磁控溅射技术，借助不同的施加衬底温度有效地调整了CuZr和CoTaB金属玻璃薄膜（MGTF）的结构。通过提高衬底温度，不同成分的MGTF实现了硬度和弹性模量的明显增强。基于纳米压痕蠕变试验，与CuZr MGTF相比，在473 K沉积的CoTaB MGTF显示出较小的应变速率敏感指数，以及较弱的光谱强度，表明其具有更好的抗蠕变性。此外，CoTaB MGTF在较高温度下沉积后，其STZ体积显著减小。根据纳米划痕分析，在473 K衬底温度下的CoTaB MGTF具有较浅的划痕宽度和较大的/值，表明其具有更好的摩擦学性能。